N2流量对等离子体增强磁控溅射TiN涂层的影响

谢启, 付志强, 岳文, 王成彪

Effect of N2 Flow Rate on TiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering

XIE Qi, FU Zhi-qiang, YUE Wen, WANG Cheng-biao

表面技术 . 2017, (6): 161 -167 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.025