调制周期对磁控溅射WB2/CrN多层薄膜力学性能的影响
范迪, 雷浩, 郭朝乾, 宫骏, 孙超
Effects of Modulation Period on Mechanical Properties of Magnetron Sputtered WB2/CrN Multilayer Films
FAN Di, LEI Hao, GUO Chao-qian, GONG Jun, SUN Chao
表面技术
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2017, (6): 156
-160
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DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.024