选择性键合金属-类金刚石复合薄膜的性能研究

选择性键合金属-类金刚石复合薄膜的性能研究

王志峰, 徐斌, 张书姣, 朱丽楠, 周兵

Properties of DLC Films Doped with Metal by Selective Bonding

WANG Zhi-feng, XU Bin, ZHANG Shu-jiao, ZHU Li-nan, ZHOU Bing

表面技术 . 2017, (6): 110 -116 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.017