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赵彦辉, 徐丽, 于海涛, 赵升升, 刘占奇, 于宝海
Study Progress of Hard Multicomponent Nitride Films
ZHAO Yan-hui, XU Li, YU Hai-tao, ZHAO Sheng-sheng, LIU Zhan-qi, YU Bao-hai
表面技术 . 2017, (6): 102 -109 .  DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.016