小靶大基片镀膜的膜厚均匀性分析

小靶大基片镀膜的膜厚均匀性分析

陈海峰, 薛莹洁

Film Thickness Uniformity of a Small-target Large-substrate Coating

CHEN Hai-feng, XUE Ying-jie

表面技术 . 2017, (2): 108 -112 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.02.017