氮气流量对磁控溅射法沉积NGZO薄膜性能的影响

杨涛, 周细应, 答建成, 朱玉坤

Effect of Nitrogen Flow Rate on Properties of NGZO Films Deposited by Magnetron Sputtering Method

YANG Tao, ZHOU Xi-ying, DA Jian-cheng, ZHU Yu-kun

表面技术 . 2017, (2): 103 -107 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.02.016