环境温度对磁控溅射Ti-Al-Si-N涂层摩擦学性能的影响

陈恩, 冯长杰

Influence of Ambient Temperature on Tribological Property of Ti-Al-Si-N Coatings Deposited by Magnetron Sputtering

CHEN En, FENG Chang-jie

表面技术 . 2017, (1): 106 -110 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.01.018