等离子体刻蚀前处理对碳基薄膜结合力的影响
李振东, 詹华, 王亦奇, 汪瑞军, 王伟平
Effects of Plasma Etching Pretreatment on Adhesion of Carbon-based Film
LI Zhen-dong, ZHAN Hua, WANG Yi-qi, WANG Rui-jun, WANG Wei-ping
表面技术
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2017, (1): 64
-68
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DOI: 10.16490/j.cnki.issn.1001-3660.2017.01.011
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