H2/Ar流量比对纳米金刚石形貌和结构的影响

熊礼威, 彭环洋, 汪建华, 崔晓慧, 龚国华

Effects of H2/Ar Flow Rate on Morphology and Structure of Nanocrystalline Diamond

XIONG Li-wei, PENG Huan-yang, WANG Jian-hua, CUI Xiao-hui, GONG Guo-hua

表面技术 . 2017, (1): 45 -50 . DOI: 10.16490/j.cnki.issn.1001-3660.2017.01.008