国内外磁控溅射靶材的研究进展

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陈海峰, 薛莹洁

Research Progress of Magnetron Sputtering Target at Home and Abroad

CHEN Hai-feng, XUE Ying-jie

表面技术 . 2016, (10): 56 -63 . DOI: 10.16490/j.cnki.issn.1001-3660.2016.10.009