PECVD 法制备掺硼纳米金刚石薄膜的工艺研究进展

熊礼威, 彭环洋, 汪建华, 崔晓慧, 龚国华

Research Progress in Preparation of Boron Doped Nanocrystalline Diamond Films by PECVD Method

XIONG Li-wei, PENG Huan-yang, WANG Jian-hua, CUI Xiao-hui, GONG Guo-hua

表面技术 . 2016, (10): 40 -48 . DOI: 10.16490/j.cnki.issn.1001-3660.2016.10.007