不同氩气气压下钒靶HIPIMS放电特性的演变
李春伟, 田修波, 巩春志, 许建平
Evolution of Discharge Characteristics of High Power Impulse Magnetron Sputtering Vanadium Target under Various Argon Pressures
LI Chun-wei, TIAN Xiu-bo, GONG Chun-zhi, XU Jian-ping
表面技术
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2016, (8): 103
-109
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DOI: 10.16490/j.cnki.issn.1001-3660.2016.08.018