自偏压对射频等离子体恢复单晶第一镜反射率的影响

万俊麟, 鄢容, 穆磊, 江泽桐, 王晨雪, 王兆辉, 李曾杰, 温煜娴

Effect of Self-bias on the Recovery of Single Crystal First Mirror Reflectivity in Radio Frequency Plasma

WAN Junlin, YAN Rong, MU Lei, JIANG Zetong, WANG Chenxue, WANG Zhaohui, LI Zengjie, WEN Yuxian

表面技术 . 2025, (18): 156 -162 . DOI: 10.16490/j.cnki.issn.1001-3660.2025.18.015