梯度基体负偏压真空多弧离子镀沉积 TiN 涂层及其力学性能

曾华智, 王海, 沈军

Arc Ion Plating with Gradient Bias Voltage Deposition and Mechanical Properties of TiN Coatings

ZENG Hua-zhi, WANG Hai, SHEN Jun

表面技术 . 2016, (2): 79 -83 . DOI: 10.16490/j.cnki.issn.1001-3660.2016.02.012