调制周期对 CrAlN / ZrN 纳米多层膜韧性的影响
张文勇, 孙德恩, 裴晨蕊, 张世宏, 黄佳木
Effect of Modulation Period on Toughness of CrAlN/ ZrN Nano-multilayer Films
ZHANG Wen-yong, SUN De-en, PEI Chen-rui, ZHANG Shi-hong, HUANG Jia-mu
表面技术 . 2016, (1): 55 -61 .  DOI: 10.16490/j.cnki.issn.1001-3660.2016.01.009