甲烷体积分数对纳米金刚石薄膜形貌的影响
熊礼威, 彭环洋, 汪建华, 崔晓慧, 龚国华
Effect of methane concentration on the morphology of nanocrystalline diamond films
XIONG Li-wei, PENG Huan-yang, WANG Jian-hua, CUI Xiao-hui, GONG Guo-hua
表面技术
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2016, (3): 72
-77
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DOI: 10.16490/j.cnki.issn.1001-3660.2016.03.012