气相沉积 Ti / TiN 多层薄膜的力学及耐腐蚀性能研究

张啸宇, 谭俊

Mechanical and Anti-corrosion Properties of Ti / TiN Multilayer Films Prepared by PVD

ZHANG Xiao-yu, TAN Jun

表面技术 . 2015, (12): 80 -84,91 . DOI: 10.16490/j.cnki.issn.1001-3660.2015.12.013