负偏压对多弧离子镀 TiN 涂层大颗粒形貌及像素分布的影响

陈昌浩, 金永中, 刘东亮, 余学金

Influence of Negative Bias Voltage on Microparticles Morphology and Pixel Distribution of TiN Coatings Deposited by Multi-arc Ion Plating

CHEN Chang-hao, JIN Yong-zhong, LIU Dong-liang, YU Xue-jin

表面技术 . 2015, (11): 29 -34 . DOI: 10.16490/j.cnki.issn.1001-3660.2015.11.005