多弧离子镀负偏压对氮化钛薄膜的影响

宋沂泽, 高原, 董中新, 张焱, 彭凯, 王成磊

Influence of Negative Bias on TiN Film Deposited by Multi-arc Ion Plating

SONG Yi-ze, GAO Yuan, DONG Zhong-xin, ZHANG Yan, PENG Kai, WANG CHENG-lei

表面技术 . 2015, (11): 1 -6,28 . DOI: 10.16490/j.cnki.issn.1001-3660.2015.11.001