目的 研究 Si 的掺入对 VAlN 硬质涂层机械性能的影响行为。 方法 利用双靶( V50 Al50 靶与Si 靶) 磁控溅射沉积技术,保持 V50 Al50 靶的功率为一定值,通过控制 Si 靶的功率,获得 Si 含量不同的VAlSiN 硬质涂层,分析涂层的成分、相组成、硬度及耐磨损性能。 结果 Si 在涂层中以 Si₃N₄ 非晶相存在,Si₃N₄ 起到细化晶粒的作用,少量 Si 的掺入可使涂层的硬度与耐磨性能得到提升。 但当 Si 大量掺入后,Si₃N₄ 非晶相成为涂层中的主相,导致涂层的硬度与耐磨性能出现下降。 结论 少量 Si 的掺入有益于 VAlN 涂层机械性能的提升。

Objective To study the effect of silicon addition on mechanical properties of the VAlN hard coatings. Methods Using the two-target ( V50Al50 target and Si target) magnetron co-sputtering machine to deposit the VAlSiN hard coatings. The silicon content was adjusted by the power applied to the silicon target. Results The silicon added in the coatings was all in the Si₃N₄ phase, which had a grain refining effect. When the silicon content was low, the mechanical properties ( both hardness and wear rate) of the coatings were improved. However, once the silicon content was higher than that, Si₃N₄ became the main phase of the coatings, and the mechanical properties of the coatings turned worse. Conclusion Adding a little silicon to the VAlN hard coatings could improve their mechanical properties.