采用磁控溅射法在不锈钢表面制备了 TiAlN 涂层,采用压入法及划痕法表征了涂层的结合强度。分析表明,压入法只能作为一种定性的测定方法,该法测得 TiAlN 涂层的结合强度达到 HF3 。 划痕法结合了声信号、摩擦力信号和划痕微观形貌,可以定量测定结合强度,该法测得在压头曲率半径为 200 滋m 的情况下, TiAlN涂层的临界载荷达到 13 N,比传统 TiN 涂层提高了 45% 。

TiAlN coating was prepared on the surface of stainless steel by magnetron sputtering mothed. Indentation and scratch test was used to investigated the adhesion strength of the coating. Results show that the indentation test is only a qualitative test method, and the adhesion strength measured by indentation test reaches HF3 . The results of scratch test show that it is combination of AE signal, frictional force signal and scratch micromorphology. It is a quantitative method for test adhesive strength. When the radius of the Rockwell indenter is 0 . 2 mm, the critical load of TiAlN coating is 13 N, contrast with the traditional TiN coating, the adhesion strength of TiAlN increased by 45 % .