采用电弧离子镀与磁控溅射联合沉积技术,以不同的 C 掺杂方式在高速钢基体表面制备了 C /TiAlSiN 多元复合硬质膜层,对膜层的成分、组织结构、显微硬度及摩擦磨损性能进行了表征,并与相同条件下制备的未掺杂 TiAlSiN 膜进行了对比。 结果表明,不同的掺杂方式使得膜层的组织与性能不同,在 TiAlSiN 硬质膜层的制备过程中实施 C 掺杂,能够显著优化该膜层体系的组织结构及显微硬度,并大大改善其摩擦磨损性能。

A combination of arc and magnetron sputtering deposition technology was used to synthesize the C / TiAlSiN hard coatings with different C incorporation modes on the high-speed steel substrates. The coating ’ s composition, microstructure, microhardness and wearing properties were studied and compared with that of TiAlSiN coatings which has none-C incorporation. It was found that the coatings had different microstructure and properties with different C incorporation mode. The incorporation of C during the TiAlSiN coating synthesis was very useful to optimize the coating’s microstructure and micro hardness,and also good for its wearing properties.