采用酸催化法、碱催化法和酸碱复合催化法制备了 SiO₂ 溶胶,进而制得 SiO₂ 减反膜。 表征了薄膜的表面形貌,测定了薄膜的透射率和硬度。 结果表明,不同催化溶胶制得的膜层在表面形貌、减反效果和薄膜硬度等方面存在明显差异:酸催化得到的薄膜,孔隙率和透过率最低,但硬度和抗划伤性最好;碱催化得到的薄膜,孔隙率和透过率最高,但硬度和抗划伤性最差;酸碱复合催化得到的薄膜,孔隙率、透过率、硬度和抗划伤性能介于以上二者之间,性能与酸碱复合催化溶胶的制备工艺密切相关。

The SiO₂sol and anti-reflective coatings were prepared by the acid, base, and acid / base composite catalyzed methods. The surface morphologies of coatings were characterized and their transmissivity and hardness were measured .The experiments results show that, the surface morphology, anti-reflective effect and hardness of the coatings from three sols are very different; The coating from acid-catalyzed sol has the minimum porosity, lowest transmissivity, but highest hardness and best scratch resistance; The coating from ammonia-catalyzed sol gets maximum porosity, highest transmissivity, but lowest hardness and worst scratch resistance; The properties of the coatings from acid / base composite catalyzed sol are between those of the coatings by acid and base catalyzed sol-gel process like porosity, transmissivity, hardness, and scratch resistance performance.These properties will be directly affected by acid / base composite catalyzed sol-gel process.