超硬薄膜能够显著提高材料的关键服役性能。系统总结了超硬薄膜的硬化机制、制备技术以及性能表征方法,分析了制备技术和性能表征方法的优缺点,指出了超硬薄膜研究发展的方向。

Super hard nanocomposite films have been used to improve service behavior of workpiece due to their excellent mechanical and chemical properties. The state-of-the-art of harden mechanisms, fabrication technique and property characterization of super hard nanocomposite films were reviewed. The advantages and disadvantages of fabrication technique and property characterization were analyzed. The developing directions of super hard nanocomposite films were proposed.