为保证三维表面形貌评定的准确性,消除测量过程中产生的脉冲噪声和基准偏斜面的影响,提出了一种基于改进中值滤波和最小二乘法的三维表面形貌评定方法。该方法通过改进中值滤波去除表面形貌测量中产生的脉冲噪声,采用最小二乘法提取基准偏斜面,表面形貌去除脉冲噪声和测量基准偏斜面后得到评定表面形貌,在此基础上,通过高斯滤波法提取粗糙度表面,并计算表面形貌典型评定参数。实验结果表明,评定表面形貌的典型评定参数可更加准确地评定三维表面形貌。

In order to ensure the accuracy evaluation of 3D surface topography, and eliminate the effect of impulse noise and basic deflection surface generated in measuring process, an evaluation method of 3D surface topography was proposed based on the improved median filter and least square method. The impulse noise of 3D surface topography was removed by the improved median filter, and the basic deflection surface was generated by the least square method. The evaluation surface was generated by removing the impulse noise and basic deflection surface, and the roughness surface was extracted by the Gaussian filter method and the typical evaluation parameters were calculated. The experimental result shows that the typical evaluation parameters of the evaluation surface can more exactly reflect 3D surface topography.