采用非平衡磁控溅射技术,通过改变Ti靶溅射电流,在不锈钢衬底表面沉积了不同掺Ti量的类金刚石薄膜(Ti-DLC),研究了掺Ti量对薄膜的显微硬度、弹性模量、膜/基结合强度、断裂韧性及摩擦磨损行为的影响。结果表明:DLC薄膜掺杂Ti后,硬度明显提高,且随着Ti靶溅射电流的增大,薄膜硬度先增加、后降低,Ti靶溅射电流为1.5A 时,薄膜硬度最高;掺杂适量的Ti,可以明显改善DLC薄膜的膜/基结合强度和断裂韧性,并能明显降低DLC薄膜的摩擦系数。

Using unbalanced magnetron sputtering technique, diamond-like carbon films with different titanium contents(Ti-DLC)were deposited on stainless steel substrates by changing Ti target supttering current. Investigated the influences of Ti content on microhardness, elastic modulus, film-substrate cohesion, fracture toughness, friction and wear behavior of films. Results showed that the hardness of the Ti-DLC films increases obviously compared with the pure DLC films. In the meantime, the hardness of the Ti-DLC films increases first and then decreases with the increase of the Titarget sputtering current and reaches the highest when Ti target sputtering current is increased to 1.5A. Film-substrate cohesion and fracture toughness of the films are improved by depositing some Ti. The friction coefficient of DLC films decreases significantly with the deposition of Ti.