硅片表面制备Ni68Co24P8 化学镀层及其性能研究

张含卓, 孙宝珠, 钟耀东, 方亮

表面技术 ›› 2012, Vol. 41 ›› Issue (4) : 10-12.

表面技术 ›› 2012, Vol. 41 ›› Issue (4) : 10-12.
研究与探索

硅片表面制备Ni68Co24P8 化学镀层及其性能研究

  • 张含卓, 孙宝珠, 钟耀东, 方亮
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Synthesis and Properties of Electroless Ni68Co24P8 Coatings on Silicon Substrates

  • ZHANG Han-zhuo, SUN Bao-zhu, ZHONG Yao-dong, FANG Liang
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摘要

在p型<100>单晶硅表面制备了Ni68Co24P8 化学镀层,分析了镀层的显微结构、耐蚀性及磁学性质。结果表明:Ni68Co24P8 镀层为非晶结构,表面均匀分布着直径约为0.5~4.2μm的球状团簇;在10.0%NaOH溶液和3.5%NaCl溶液中,镀层表现出活化—钝化—过钝化的腐蚀行为,而在1.0%H2SO4 溶液中,镀层表面无法形成钝化膜,耐蚀性大幅下降;室温下,Ni68Co24P8 镀层呈典型的软磁特征,饱和磁化强度为33.4A·m2/kg。

Abstract

Electroless Ni68Co24P8 coatings were synthesized on p-type Si<100>substrates. Microstructures corrosion resistane and magnetic property of Ni68Co24P8 coatings were investigated. The results indicate that an amorphous phase for Ni68Co24P8 coatings with 0.5~4.2 μm nodule clusters distributes uniformly on the coating surface. In 10.0%NaOH and 3.5% NaCl solutions Ni68Co24P8 coatings show an active-passive-transpassive behavior. However, in 1.0%H2SO4 solution, no passivation films can be formed and the corrosion resistance of the coatings is decreased prominently. Furthermore, the Ni68Co24P8 coatings exhibite typical soft-magnetic characterization and the saturation magnetization is 33.4 A·m2/kg.

关键词

Ni-Co-P镀层;化学镀;显微结构;腐蚀;磁性

Key words

Ni-Co-P coatings; electroless plating; microstructures; corrosion; magnetic properties

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张含卓, 孙宝珠, 钟耀东, 方亮. 硅片表面制备Ni68Co24P8 化学镀层及其性能研究[J]. 表面技术. 2012, 41(4): 10-12
ZHANG Han-zhuo, SUN Bao-zhu, ZHONG Yao-dong, FANG Liang. Synthesis and Properties of Electroless Ni68Co24P8 Coatings on Silicon Substrates[J]. Surface Technology. 2012, 41(4): 10-12

基金

中央高校基本科研业务费(2010QNA08)

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