从电弧蒸发源控制技术和大颗粒过滤技术出发,论述了电弧离子镀技术最近的发展成果,并总结了电弧离子镀技术在氮化物、氧化物、非晶碳等薄膜方面的技术应用进展,以期能对我国电弧离子镀技术及其在硬质薄膜方面的应用起到一定的参考作用。

The progress of vacuum arc deposition has been discussed from arc mode of operation and the technology of macroparticles filter, and then, the application and progress in hardness films, such as ta-C,CNx,nitride,oxide and advanced films, have been described. The aim of this paper is providing a reference in vacuum arc deposition and its application for researchers in our nation.