目的 探究不同冲蚀角度和不同磨料粒径对复相陶瓷材料反应烧结碳化硅（RB-SiC）表面的影响规律,为提高复相材料加工效率提供理论支持。方法 提出一种基于文丘里效应的气-液-固多相射流微细加工方法,通过有限元仿真对多相射流发生装置进行数值分析,确定形成稳定负压的喷嘴最小临界直径。采用不同粒径碳化硅（SiC）磨料和不同冲蚀角度的加工参数,探究RB-SiC材料冲蚀去除速率和加工表面质量在上述工艺参数下的演变规律。结果 当喷嘴直径为5 mm时,在混合腔内形成有效负压区,并卷吸磨料浆液进而形成稳定的气-液-固多相射流。在相同冲蚀角度下,材料去除率与磨料粒径呈负相关性;表面粗糙度先增大后减小,在1000目时达到峰值。通过表面形貌发现,大粒径磨料以实现RB-SiC的“各向同性”脆性冲蚀去除为主;中等粒径磨料则以实现对Si相和SiC晶粒的差异性冲蚀去除;而小粒径磨料冲蚀去除过程中复相材料脆塑转变占据主导因素。进一步研究冲蚀角度对RB-SiC加工表面的影响时发现,当使用中等粒径和75°冲蚀角时,保证较高材料去除率的同时,实现高平整性加工。结论 磨料的高切向作用力和法向作用力的协同作用,有利于促进Si相的冲蚀去除和SiC晶粒剥落,实现RB-SiC加工效率的提升与表面粗糙度的降低。该研究成果可为复相陶瓷材料的微细加工提供参考。
Abstract
Reaction-bonded silicon carbide (RB-SiC), commonly referred to as SiC particle-reinforced Si matrix composite, is a representative composite ceramic material renowned for its high strength, exceptional hardness, and outstanding wear resistance that have enabled its extensive utilization in critical engineering applications including mechanical seals and lubrication systems. However, the inherent heterogeneity in the distribution of the constituent silicon (Si) and silicon carbide (SiC) phases, coupled with the pronounced divergence in their mechanical properties, renders conventional machining techniques inadequate for achieving a high-quality flat surface. To overcome this limitation, the work aims to introduce an innovative micromachining approach of employing a gas-liquid-solid multiphase jet based on the Venturi principle. A comprehensive numerical analysis of the jet generation system was performed through ANSYS Fluent finite element simulation to elucidate the pressure distribution characteristics of the airflow within the mixing chamber. Through this simulation, the minimum critical nozzle diameter necessary to establish a stable negative pressure regime was identified, thereby confirming the technical feasibility of conducting precision microstructure machining on RB-SiC substrates. To systematically investigate the effects of two key process parameters including erosion angle and abrasive particle size, on the surface characteristics of RB-SiC and to furnish a theoretical foundation for enhancing the machining efficiency of multiphase ceramics, a meticulously designed single-factor experimental study was implemented. This involved employing silicon carbide (SiC) abrasives of distinct particle sizes at varying impingement angles to examine the concomitant evolution of material erosion rate and surface integrity under the specified conditions. The simulation outcomes demonstrated that with a nozzle diameter of 5 mm, the high-velocity airflow traversing the generator established a well-defined negative pressure zone in the mixing chamber, which effectively entrained the abrasive slurry to generate a stable and coherent gas-liquid-solid multiphase jet. Building upon this validated nozzle configuration, a series of controlled single-factor machining experiments were executed. The experimental results indicated that, for a given erosion angle, the material removal rate exhibited a negative correlation with abrasive particle size. In contrast, the surface roughness followed a non-monotonic trend, initially increasing to a maximum before decreasing, with the peak value observed at a mesh size of 1000 mesh. Morphological analysis of the machined surfaces revealed distinct removal mechanisms: when larger abrasives were used, material removal primarily occurred via an "isotropic" brittle fracture mode across the composite. With medium-sized abrasives, whose particle dimensions corresponded closely to the characteristic scale of the two-phase interfaces, a differential erosion mechanism became dominant, selectively eroding the softer Si matrix and promoting the subsequent dislodgement of the harder SiC grains. When finer abrasives were employed, the erosion process was governed largely by the brittle-to-ductile transition behavior of the multiphase material. Further investigation into the effect of erosion angle revealed that the synergistic application of medium-sized abrasives at a 75° impingement angle optimized the normal and tangential force components exerted by the abrasive particles. This synergy effectively enhances the erosive removal of the Si phase and facilitates the spalling of SiC grains, successfully reconciling a high material removal rate with the attainment of superior surface flatness. Consequently, the integrated findings from the numerical and experimental studies presented herein offer substantive insights and a reliable reference framework for advancing the precision micromachining of complex, heterogeneous ceramic materials.
关键词
多相射流 /
RB-SiC /
喷嘴直径 /
冲蚀角度 /
磨料粒径 /
材料去除行为 /
表面形貌
Key words
multiphase jet /
RB-SiC /
nozzle diameter /
erosion angle /
abrasive particle size /
material removal behavior /
surface morphology
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基金
山东省自然科学基金项目（ZR2024ME225,ZR2023QE035）; 国家自然科学基金项目（52605719、52575506）; 国家级大学生创新训练计划项目（202510433004）; 山东省重点研发计划（科技型中小企业创新能力提升工程）（2025TSGCCZZB0360）
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