目的 明确不同电镀工艺参数对钨丝表面电镀镍层的影响。方法 在45 ℃、2.5 A/dm2的温度和电流密度条件下,对钨丝开展电镀镍研究,获得了结合强度优良的镀镍层,利用电子放大镜、扫描电镜、能谱分析对镀镍层进行表征,明确了电镀时间、盐酸体积分数和主盐浓度对镀镍层的完整性、表面形貌、厚度和槽电压的影响。结果 研究表明,镀镍层厚度随时间延长、盐酸体积分数和主盐质量浓度增加而增加。电镀40~80 s时,镀镍层逐渐均匀致密,电镀时间超过120 s后镀镍层逐渐出现不均匀现象。镀液中不添加盐酸时无法获得完整的镀镍层,盐酸体积分数为10 mL/L时,可形成完整的镀镍层,盐酸体积分数增加到20~40 mL/L时,镀镍层逐渐致密平整,且槽电压随盐酸体积分数增加而逐渐降低且稳定。主盐质量浓度低于100 g/L时,镀镍层无法完全覆盖钨丝基体,槽电压随主盐质量浓度增加而降低且平稳。结论 综合考虑,当电镀时间100 s、盐酸体积分数20 mL/L、主盐质量浓度100 g/L时可在钨丝表面获得综合质量优异的镀镍层。
Abstract
At present, relevant researches focusing on the nickel electroplating technology for tungsten wires are still rather limited. Nevertheless, tungsten probes are widely utilized in the probe card industry, which renders the research on nickel electroplating of tungsten wires of great practical value and exploratory significance. The work aims to systematically investigate the effects of various electroplating process parameters on the nickel coatings deposited on tungsten wire surfaces.
Nickel electroplating experiments on tungsten wires were implemented under a fixed temperature of 45 ℃ and a current density of 2.5 A/dm2, and nickel coatings with outstanding interfacial bonding strength were successfully prepared in the experiment. A series of characterization methods including electronic magnifier observation, scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) were adopted to analyze the as-deposited nickel layers. The work quantitatively clarifies how three key parameters, namely electroplating time, hydrochloric acid concentration and main salt concentration, affect four critical indicators of nickel coatings: coating integrity, surface morphology, coating thickness and plating cell voltage.
The experimental results reveal that the thickness of nickel coatings increases with the extension of electroplating duration, as well as the rising concentration of hydrochloric acid and main salt. Within the electroplating time range from 40 seconds to 80 seconds, the nickel coating becomes progressively uniform and compact as the plating process proceeds. However, once the electroplating time exceeds 120 seconds, continuous metal deposition will occur over an excessively long period, which gradually triggers uneven distribution and poor flatness of the nickel coating.
No intact and continuous nickel coating can be obtained on tungsten substrates if no hydrochloric acid is added to the plating bath. A fully covered nickel layer will form when the hydrochloric acid concentration reaches 10 ml/L. When the hydrochloric acid concentration is adjusted within the range of 20 mL/L to 40 mL/L, the nickel coating turns denser and smoother with the increase of hydrochloric acid dosage. Meanwhile, the plating cell voltage declines gradually and maintains a stable level as hydrochloric acid concentration rises. Hydrochloric acid plays two vital roles in the electroplating system: it stabilizes the pH value of plating solution, which contributes to the formation of smooth and delicate nickel coatings, and additionally, it activates the anode to guarantee stable metal ion dissolution.
With regard to the main salt, if its concentration is lower than 100 g/L, the tungsten wire substrate cannot be fully covered by nickel deposition, and the plating cell voltage decreases and tends to stay steady as the main salt concentration goes up. Nickel chloride (NiCl2) is selected as the main salt in this plating system. A relatively high concentration of nickel chloride supplies abundant nickel ions in the bath, facilitating the close and ordered arrangement of nickel ions during electrodeposition, so as to construct nickel coatings with superior microstructure and comprehensive quality.
After comprehensive evaluation of coating integrity, surface flatness, thickness uniformity and stable operating voltage, the optimal combination of process parameters is determined: electroplating time of 100 s, hydrochloric acid concentration of 20 ml/L and main salt concentration of 100 g/L. Under this optimized parameter combination, nickel coatings with excellent overall performance can be successfully fabricated on the surface of tungsten wire substrates.
关键词
钨丝 /
电镀镍 /
工艺参数 /
形貌 /
镀层性能
Key words
tungsten wire /
electroplated nickel /
process parameter /
morphology /
coating performance
{{custom_sec.title}}
{{custom_sec.title}}
{{custom_sec.content}}
参考文献
[1] TUNABOYLU B, SOYDAN A M.MEMS Technologies Enabling the Future Wafer Test Systems[M] . MEMS Sensors-Design and Application. IntechOpen: InTech, 2018.
[2] MANN W R, TABER F L, SEITZER P W, et al.The Leading Edge of Production Wafer Probe Test Technology[C]//2004 International Conferce on Test. Charlotte, NC, USA. IEEE, 2004: 1168-1195.
[3] 杨跃胜, 武岳山. 探针卡在芯片产业化中的应用分析[J]. 中国集成电路, 2017, 26(4): 58-61.
YANG Y S, WU Y S.Analyze the Performance for Prober Card in Chip Industrialization[J]. China Integrated Circuit, 2017, 26(4): 58-61.
[4] 李明远, 董亚宁, 王威, 等. 基于晶圆测试的探针卡设计及测试方法研究[J]. 电子元器件与信息技术, 2023, 7(7): 7-11.
LI M Y, DONG Y N, WANG W, et al.Research on Probe Card Design and Test Method Based on Wafer Test[J]. Electronic Components and Information Technology, 2023, 7(7): 7-11.
[5] 王莉莉. 新的测试技术发展的产物——探针卡[J]. 轻工科技, 2012, 28(7): 96-97.
WANG L L.The Product of the Development of New Testing Technology—Probe Card[J]. Light Industry Science and Technology, 2012, 28(7): 96-97.
[6] 王粟. MEMS垂直探针的设计和加工技术研究[D]. 哈尔滨: 哈尔滨工业大学, 2019.
WANG S.Design and Fabrication of MEMS Vertical Probe[D]. Harbin: Harbin Institute of Technology, 2019.
[7] 蔡晓峰, 余凯, 邓敏, 等. 悬臂探针卡在超高温晶圆测试领域的应用技术[J]. 中国集成电路, 2024, 33(7): 87-91.
CAI X F, YU K, DENG M, et al.Application Technology of Cantilever Probe Card in Ultra-High Temperature Wafer Testing Field[J]. China Integrated Circuit, 2024, 33(7): 87-91.
[8] 洪祥乐. 金属钨表面电镀的研究[J]. 佛山科学技术学院学报(自然科学版), 1999, 17(3): 1-5.
HONG X L.A Study on the Surface Electroplating of Metallic Tungsten[J]. Journal of Foshan University (Natural Science Edition), 1999, 17(3): 1-5.
[9] 高磊. 化学镀镍与电镀镍工艺的应用研究[J]. 化学工程与装备, 2008(8): 87-89.
GAO L.Study on the Application of Electroless Nickel Plating and Electroless Nickel Plating[J]. Chemical Engineering & Equipment, 2008(8): 87-89.
[10] QIN H B, ZHU S H, HUANG J, et al.Comparative Analysis of Mechanical Behavior between Electroless and Electroplated Ni Layers and Their Influence on Si Chip Warpage[J]. Journal of Materials Science: Materials in Electronics, 2025, 36(21): 1318.
[11] 宋玉, 黄涛, 陈小平, 等. 水合肼体系化学镀镍时间对钕铁硼电镀/化学镀镍层耐蚀性的影响[J]. 电镀与涂饰, 2020, 39(13): 817-822.
SONG Y, HUANG T, CHEN X P, et al.Effect of Electroless Plating Time in a Bath with Hydrazine Hydrate as Reductant on Corrosion Resistance of Electroplated/Electroless Plated Bilayered Nickel Coating on Neodymium-Iron-Boron Permanent Magnet[J]. Electroplating & Finishing, 2020, 39(13): 817-822.
[12] HAN B H, LUO T J, LIANG C L, et al.Electroless Nickel-Plated Carbon Fiber Reinforced Aluminum Matrix Composites[J]. Materials Review, 2006(S2): 447-450.
[13] 李兴, 张艳华, 吴荣归, 等. P型Bi2Te3基热电材料直接电镀镍[J]. 材料科学与工程学报, 2010, 28(2): 300-303.
LI X, ZHANG Y H, WU R G, et al.Direct Electro-Plated Nickel on P-Type Bi2Te3 Based Thermoelectric Materials[J]. Journal of Materials Science and Engineering, 2010, 28(2): 300-303.
[14] 王思醇, 岑廷刺, 罗毅, 等. 电镀镍过程智能控制方法的探讨[J]. 电镀与涂饰, 2019, 38(1): 9-13.
WANG S C, CEN T C, LUO Y, et al.Discussion on Intelligent Control of Nickel Electroplating Process[J]. Electroplating & Finishing, 2019, 38(1): 9-13.
[15] 韩笑, 周玉玺, 王增加, 等. 电镀时间对碳纤维表面连续电镀镍的影响[J]. 电镀与涂饰, 2014, 33(9): 363-365.
HAN X, ZHOU Y X, WANG Z J, et al.Influence of Plating Time on Continuous Nickel Electroplating of Carbon Fiber[J]. Electroplating & Finishing, 2014, 33(9): 363-365.
[16] 梅天庆. 从葡萄糖酸盐镀液中电镀枪色镍锡合金[J]. 材料保护, 1998, 31(12): 3-5.
MEI T Q.Gun Color Ni-Sn Alloy Electroplating with Gluconate Baths[J]. Materiais Protection, 1998, 31(12): 3-5.
[17] 马春霞, 胡会利, 李宁, 等. 焦磷酸盐体系电镀Ni70Cu30合金工艺[J]. 电镀与涂饰, 2009, 28(8): 17-20.
MA C X, HU H L, LI N, et al.Electroplating of Ni70Cu30 Alloy from Pyrophosphate Bath[J]. Electroplating & Finishing, 2009, 28(8): 17-20.
[18] 余凤斌, 郭涵, 曹建国, 等. 镀镍铜粉的制备及性能表征[J]. 电镀与涂饰, 2011, 30(7): 21-23.
YU F B, GUO H, CAO J G, et al.Preparation and Characterization of Nickel-Coated Copper Powder[J]. Electroplating & Finishing, 2011, 30(7): 21-23.
[19] 范士军, 季雪明, 张存福. 低主盐浓度酸性锌-镍合金电镀工艺[J]. 电镀与涂饰, 2021, 40(21): 1609-1611.
FAN S J, JI X M, ZHANG C F.Electroplating of Zinc-Nickel Alloy in an Acidic Bath with Low Concentration of Main Salts[J]. Electroplating & Finishing, 2021, 40(21): 1609-1611.
[20] 曹卓坤, 刘宜汉, 姚广春. 硫酸盐酸性镀液中碳纤维电镀铜[J]. 过程工程学报, 2006, 6(4): 651-655.
CAO Z K, LIU Y H, YAO G C.Electroplating of Carbon Fibers in Sulfate Acidic Solution[J]. The Chinese Journal of Process Engineering, 2006, 6(4): 651-655.
[21] 黄勇, 吴宁, 胡忠卿, 等. 5, 5-二甲基乙内酰脲配位体系酸性镀镉工艺优化[J]. 电镀与精饰, 2023, 45(1): 85-91.
HUANG Y, WU N, HU Z Q, et al.Optimization of Acidic Cadmium Plating Process Using 5, 5-Dimethylhydantoin as Complexing Agent[J]. Plating and Finishing, 2023, 45(1): 85-91.
[22] 肖秀峰, 刘榕芳, 朱则善. 镍-钨-碳化钨复合电极在盐酸介质中的阳极极化行为的研究[J]. 电镀与涂饰, 1999, 18(2): 27-30.
XIAO X F, LIU R F, ZHU Z S.Studies on the Anodic Behavior of Nickel-Tungsten-Tungsten Carbide Composite Electrode in Hydrochloric Acid Solutions[J]. Electroplating & Finishing, 1999, 18(2): 27-30.
[23] 李延伟, 尚雄, 姚金环, 等. 氨基乙酸中性电镀镍工艺[J]. 电镀与涂饰, 2013, 32(1): 10-13.
LI Y W, SHANG X, YAO J H, et al.Nickel Plating Process from Neutral Glycine Electrolyte[J]. Electroplating & Finishing, 2013, 32(1): 10-13.
[24] 李福毅, 雷荣伦, 周桂绵. 镀镍溶液中硼酸及氯离子含量的电位滴定测定法[J]. 材料保护, 1980, 13(6): 40-43.
LI F Y, LEI R L, ZHOU G M.Potentiometric Titration Method for Determination of Boric Acid and Chloride Ion Content in Nickel Plating Solution[J]. Materials Protection, 1980, 13(6): 40-43.
[25] 郭琳. 电镀基础与实验[M]. 北京: 中国纺织出版社, 2020: 159.
GUO L.Fundamentals and Experiments of Electroplating[M]. Beijing: China Textile Press, 2020: 159.
[26] 杨亭, 龙汉, 张云云, 等. 电沉积参数对Ni-Co-P复合电镀层性能的影响[J]. 电镀与精饰, 2025, 47(12): 117-123.
YANG T, LONG H, ZHANG Y Y, et al.Influence of Electrodeposition Parameters on the Properties of Ni-Co-P Composite Electroplating Coatings[J]. Plating & Finishing, 2025, 47(12): 117-123.
[27] 张曙娟, 陈乐, 魏垣伟, 等. 电镀锌镍合金技术应用研究[J]. 新技术新工艺, 2024(3): 67-75.
ZHANG S J, CHEN L, WEI Y W, et al.Research on Application of Electroplating Zinc-Nickel Alloy Technology[J]. New Technology & New Process, 2024(3): 67-75.
[28] 许周烽, 孔水龙, 董朝晖, 等. Incoloy-800H合金表面镀镍层在氯化物熔盐中的腐蚀行为[J]. 腐蚀与防护, 2020, 41(11): 38-42.
XU Z F, KONG S L, DONG Z H, et al.Corrosion Behavior of Incoloy-800H Alloy Surface Nickel Plating in Chloride Molten Salts[J]. Corrosion and Protection, 2020, 41(11): 38-42.
[29] 刘向艳, 郭锋, 李鹏飞, 等. 镁合金微弧氧化陶瓷层表面化学镀镍研究[J]. 表面技术, 2010, 39(5): 8-10.
LIU X Y, GUO F, LI P F, et al.Study on Electroless Nickel Plating on Micro-Arc Oxidation Ceramics Layer of Magnesium Alloy[J]. Surface Technology, 2010, 39(5): 8-10.
[30] 熊俊波, 张秀芝, 许刚. 镁合金AZ91表面化学镀镍层的制备及性能研究[J]. 表面技术, 2009, 38(2): 34-36.
XIONG J B, ZHANG X Z, XU G.Study on the Preparation and Property of Coatings on AZ91 Magnesium Alloy by Electroless Nickel Plating[J]. Surface Technology, 2009, 38(2): 34-36.
[31] 李彭瑞, 任春江, 章军云, 等. 电镀参数对电镀镍层性能的影响[J]. 电镀与精饰, 2022, 44(2): 26-29.
LI P R, REN C J, ZHANG J Y, et al.Effect of Electroplating Parameters on the Performance of Electroplating Nickel Layer[J]. Plating and Finishing, 2022, 44(2): 26-29.
[32] 杭志明, 凌强. 电镀液成分对连铸结晶器合金镀层的影响[J]. 电镀与精饰, 2025, 47(7): 42-47.
HANG Z M, LING Q.The Influence of Electroplating Solution Composition on the Alloy Coating of Continuous Casting Crystallizer[J]. Plating & Finishing, 2025, 47(7): 42-47.
[33] SHI X, ZHU S Y, ZHOU Q Y, et al.Electrodeposition and Corrosion Resistance of Ni-Mo Alloy Coating: Effect of Electroplating Bath pH Values[J]. Crystals, 2026, 16(1): 51.
[34] 覃奇贤, 刘淑兰. 电镀溶液的导电性[J]. 电镀与精饰, 2008, 30(2): 24-26.
QIN Q X, LIU S L.Electric Conductivity of Electroplating Bath[J]. Plating & Finishing, 2008, 30(2): 24-26.
[35] 袁诗璞. 第五讲──电镀液的组分及其作用(二)[J]. 电镀与涂饰, 2008, 27(12): 39-40.
YUAN S P.Lecture 5—Composition and Function of Electroplating Solution (2)[J]. Electroplating & Finishing, 2008, 27(12): 39-40.
基金
国家自然科学基金(52274377,52304391); 辽宁省自然科学基金(2023-MSBA-133); 中央高校基本科研业务专项资金(N2402010); 福建省自然科学基金(2025J01384); 江苏省基础研究计划(BK20243005)