Cu基双金属纳米多层膜的微观结构、力学性能及耐蚀性研究进展

高瑞泽; 张小明; 郭璇; 孙雯倩; 原欣怡

doi:10.16490/j.cnki.issn.1001-3660.2026.18.001

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表面技术 ›› 2026, Vol. 55 ›› Issue (18) : 1-13. DOI: 10.16490/j.cnki.issn.1001-3660.2026.18.001

腐蚀与防护

Cu基双金属纳米多层膜的微观结构、力学性能及耐蚀性研究进展

高瑞泽, 张小明^*, 郭璇, 孙雯倩, 原欣怡

作者信息 +

Research Progress of Microstructures, Mechanical Properties, and Corrosion Resistance of Cu-based Bimetallic Nanomultilayer Films

GAO Ruize, ZHANG Xiaoming^*, GUO Xuan, SUN Wenqian, YUAN Xinyi

Author information +

文章历史 +

摘要

Cu基双金属纳米多层膜作为一种可通过组元与结构精细调控的新型纳米结构材料,凭借其高密度的异质界面特征,展现出优秀的力学性能和耐蚀性等,在微电子机械系统、柔性电子器件及表面防护工程等领域具有广阔的应用前景。近年来,随着微纳尺度力学测试技术及界面表征手段的进步,该类材料的界面效应、尺寸效应及其与宏观性能的关联机制已成为前沿研究热点。本文从“功能基元”与“几何序构”协同调控的视角出发,系统综述了近年来国内外关于Cu基双金属纳米多层膜微观结构演变机制的研究进展,重点分析不同晶体结构匹配对多层膜微观特征的影响机制。在此基础上,论述了其内在尺寸相关的力学特性演化行为,系统总结了界面结构和晶粒形貌主导的强化机理,说明多层膜的协同强化机制。同时,本文从界面工程的角度综述了提升材料耐蚀性的优化策略,包括引入金属元素形成钝化膜、利用多层结构阻断腐蚀通道、提高表面疏水性,以及引入非晶相等途径。最后对Cu基双金属纳米多层膜的发展方向进行了展望。

Abstract

Cu-based bimetallic nanomultilayers, as a novel class of nanostructured materials whose components and structures can be precisely tailored, exhibit significantly superior mechanical properties and corrosion resistance compared to traditional single-layer films due to their high-density heterogeneous interfaces. Consequently, they demonstrate broad application prospects in high-tech fields such as microelectromechanical systems (MEMS), flexible electronic devices, and surface protection engineering. In recent years, with the continuous advancement of micro- and nanoscale mechanical testing techniques and high-resolution interface characterization methods, researchers have been able to reveal interface effects, size effects, and their intrinsic correlations with macroscopic properties at a more refined structural level. This direction has gradually become a frontier hotspot in materials science.
From the perspective of synergistic regulation of "functional units" and "geometric configurations", the work aims to systematically review recent progress in research on the microstructural evolution mechanisms of Cu-based bimetallic nanomultilayers. It focuses on analyzing the effect of different crystal structure matching on their microstructural characteristics and discusses the critical role of interfacial energy states and lattice mismatch in the growth behavior of the multilayers. From the perspective of component layer matching, the evolution of grain morphology characteristics across multiple layers is investigated, and the formation conditions of polycrystalline lattice structures are systematically summarized. Furthermore, the transformation process of interface structures driven by thermodynamics is elucidated, and an in-depth comparison is made regarding the significant differences in grain morphology, interface structure, energy state, and stability between crystalline/crystalline and crystalline/amorphous multilayers.
On this basis, the evolution of size-dependent mechanical properties is discussed in detail, pointing out that the multilayers exhibit pronounced size effects and characteristics dominated by small-scale interfaces. The strengthening mechanisms governed by interface structures and grain sizes under dimensional constraints are systematically summarized, revealing the synergistic role of grain boundaries and phase boundaries in coordinating the deformation process, and elucidating the intrinsic mechanisms by which the multilayers achieve significantly enhanced mechanical properties at the nanoscale. It is also noted that the introduction of an amorphous phase can significantly alter the strengthening mode, and the crystalline-amorphous composite deformation mechanism is introduced. Meanwhile, it is proposed that the multilayers, relying on their high-density interfacial physical barrier effect and interlayer electrochemical synergy, possess unique advantages in improving corrosion resistance. From the perspective of interface engineering, various optimization strategies for enhancing corrosion resistance are proposed, including introducing metallic elements to form dense passive films, utilizing multilayer interfaces to block the propagation paths of corrosion channels, improving surface hydrophobicity, and incorporating an amorphous phase.
Finally, this work provides an outlook on the future development directions and prospects of Cu-based bimetallic nanomultilayers. It suggests establishing quantitative prediction models that link microstructural parameters (layer thickness, interfacial coherency, grain size, etc.) with macroscopic properties, by combining high-throughput computations and machine learning. Attention should also be paid to the material behavior under severe service environments involving coupled mechanical-electrochemical-chemical multi-fields, so as to provide a scientific basis for designing engineered multilayer materials with high stability and reliability.

导出引用

高瑞泽, 张小明, 郭璇, 孙雯倩, 原欣怡. Cu基双金属纳米多层膜的微观结构、力学性能及耐蚀性研究进展[J]. 表面技术. 2026, 55(18): 1-13

GAO Ruize, ZHANG Xiaoming, GUO Xuan, SUN Wenqian, YUAN Xinyi. Research Progress of Microstructures, Mechanical Properties, and Corrosion Resistance of Cu-based Bimetallic Nanomultilayer Films[J]. Surface Technology. 2026, 55(18): 1-13

中图分类号： TG174.44

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