目的 研究Y含量对（TiCrNbAlY）C高熵碳化物（HEC）薄膜微观结构、力学及摩擦学性能的影响。方法 用多弧离子镀（MAIP）技术在Inconel 718合金和硅片上沉积一系列不同Y含量的（TiCrNbAlY）C HEC薄膜。通过X射线衍射仪、扫描电子显微镜、透射电子显微镜和摩擦磨损试验机等对薄膜的微观结构、力学、摩擦学性能做系统表征。结果 发现随着薄膜中Y含量增加,起初薄膜的物相结构未发生明显变化,维持FCC结构不变。继续增加Y含量（原子数分数）至7.8%时,由于更多Y原子占据FCC结构中阳离子亚晶格位点后会使整体晶格畸变量过大,因此薄膜将无法维持FCC结构并逐渐非晶化,同时过量的Y会以金属相析出。与薄膜的结构变化相对应,起初薄膜的硬度变化不明显,但当薄膜非晶化后其硬度和压痕模量均明显降低,从3.5%（原子数分数）时的(21.06±0.47) GPa和(273.32±16.02) GPa分别持续降低至11.3%（原子数分数）时的(15.81±0.65) GPa和(224.06±17.73) GPa。对于薄膜的摩擦学性能,由于掺杂Y后在对偶球表面形成的稳定转移膜改变了原本的摩擦界面,因此即便是少量（原子数分数3.5%）Y的掺杂也会显著提升薄膜的抗摩擦磨损性能,磨损率由未掺杂Y时的3.18×10-6 mm3/(N·m)大幅降低至7.8%时的7.23×10-7 mm3/(N·m)。然而,由于过量的Y大幅降低了薄膜的力学性能,因此在Y含量（原子数分数）增大至11.3%时,薄膜的磨损率又增长至1.56×10-6 mm3/(N·m)。结论 适量掺杂Y可在不损失(TiCrNbAlY)C薄膜力学性能的前提下有效提高薄膜的结合力与抗摩擦磨损性能。
Abstract
In order to investigate the effect of Y content on the microstructure, mechanical and tribological properties of the (TiCrNbAlY)C high-entropy carbide (HEC) films. A series of (TiCrNbAlY)C HEC films with different Y contents were deposited on Inconel 718 high-temperature alloys and silicon wafers by the multi-arc ion plating (MAIP) system. The microstructures, mechanical and tribological properties, as well as the wear track and wear scar after the friction and wear tests were systematically characterized by X-ray diffractometer (XRD), scanning electron microscope (SEM), transmission electron microscope (TEM), nanoindentation tester, and ambient tribometer. It was found that with the increase of Y content in the HEC films, the phase structure of the films did not change significantly at first, and the original FCC structure was maintained. With the increasing Y content, the structure of the film could not maintain the FCC structure and would gradually transfer to amorphous structure. This mainly resulted from that the atomic radius of Y element was significantly larger than that of several other metal elements in the (TiCrNbAlY)C films. When excess Y were added into the HEC films, more Y atoms occupying the cationic sublattice sites in the FCC structure led to excessive lattice distortion. Thus, the films with Y content of 7.8at.% presented the amorphous structure in the XRD pattern. In addition, the excess Y was also present in the metallic phase, which was harmful to the mechanical properties of films. Corresponding to the structural evolution of the films, both the hardness and elasticity modulus did not change significantly with the increasing of Y content at first. However, when the Y content increased from 3.5at.% to 11.3at.%, the hardness and indentation modulus of the films synchronously decreased from (21.06±0.47) GPa and (273.32±16.02) GPa at 3.5at.% to (15.81±0.65) GPa and (224.06±17.73) GPa at 11.3at.%, respectively. This was not only related to the amorphization of the films, but also to the formation of the soft metal Y phase due to the excess Y. As regard to the tribological properties of the films, it was found that even a small amount of Y doping (3.5at.%) could significantly improve the tribological properties, especially for the wear rate. Benefiting from the formation of a stable transfer layer on the surface of the counterpart ball when friction tests were conducted on the films doped with Y, the wear rate drastically decreased from 3.18×10-6 mm3/(N·m) of films free of Y to the 7.23×10-7 mm3/(N·m) for films with 7.8at.% Y. However, since excess Y content substantially reduced the mechanical properties of the films, the wear rate of the films increased slightly to 1.56×10-6 mm3/(N·m) when the Y content increased to 11.3at.%. In summary, an appropriate doping amount of Y can effectively improve the bonding force and wear resistance of the (TiCrNbAlY)C HEC films without reducing the mechanical properties. The results in this work will provide a certain reference for the further development and industrial application of high-entropy carbide films.
关键词
(TiCrNbAlY)C /
高熵碳化物 /
非晶化 /
力学性能 /
摩擦学性能 /
多弧离子镀
Key words
(TiCrNbAlY)C /
high-entropy carbide /
amorphization /
mechanical properties /
tribological properties /
MAIP
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基金
国家自然科学基金（U2141210）; “一三五”重大突破项目（KJZLZD-3）; 甘肃省科技重大专项（22ZD6GA002）
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