目的 提高非球面玻璃镜片的抛光面型精度。方法 针对非球面玻璃镜片抛光加工中存在面型补偿精度差的问题。采用聚氨酯作为磨头的抛光方式,通过分析抛光工具与工件的接触状态和速度关系,考虑了不同位置抛光路径积分弧长的差异,构建去除函数模型;探究抛光工具与工件的转速比对去除函数廓形高斯分布特性程度及各点等驻留时间下整体去除量均匀性的影响;分析不同转速比的面型补偿驻留时间及补偿精度,最后采用最优转速比对非球面玻璃镜片进行抛光实验。结果 证明了转速比为1时去除函数廓形高斯特性、整体去除量均匀性最佳,均匀系数为0.068。对非球面玻璃进行面型补偿抛光仿真与实验。结果表明最优转速比条件下的驻留时间最平稳,且仿真的补偿面型精度最高。通过抛光面型补偿实验将非球面玻璃镜片γPV从6.275 3 μm降低至0.220 3 μm,γRMS从1.949 5 μm降低至0.036 4 μm。结论 以转速比1作为参数可以提升去除廓形高斯分布特性程度及整体去除量均匀性。与其他转速比相比,转速比为1的面型补偿驻留时间更平缓,加工面型精度更高。证明了最优转速比对非球面玻璃镜片面型精度提升与驻留时间平稳控制的有效性。
Abstract
A small-tool polishing technique that can significantly improve surface figure accuracy and the stability of surface figure compensation without altering the polishing tool is proposed. By investigating the optimal tool-to-workpiece speed ratio, the precision and stability of surface figure compensation can be further enhanced. Considering the challenges in aspheric glass lens polishing, such as insufficient polishing accuracy and the occurrence of surface figure defects, this study focuses on optimizing the speed ratio between the polishing tool and the workpiece to improve both surface figure compensation accuracy and process stability.
With aspheric glass lenses as the polishing objects, a polyurethane tool is employed for surface figure compensation polishing. Based on the contact conditions between the polishing tool and the workpiece, pressure and velocity distributions are analyzed, and the variation of integrated polishing path lengths at different radial positions is considered to establish a material removal function model. Surface figure errors are measured using a UA3P measurement system. Tool-to-workpiece speed ratios of 20, 2, 1, -20, -2, and -1 are investigated through model simulations combined with experimental validation to examine their effect on the Gaussian characteristics of the removal function profile and the uniformity of overall material removal under equal dwell times. Furthermore, simulations are used to compare dwell times and surface figure compensation accuracy under different speed ratios. Finally, polishing experiments on various aspheric glass lenses are conducted using the optimal speed ratio, and the polishing performance is evaluated by comparing the peak-to-valley (γPV) and root-mean-square (γRMS) surface figure errors before and after polishing.
Based on the established material removal model, the results indicate that a speed ratio of 1 yields the optimal Gaussian characteristics of the removal function and the highest uniformity of overall material removal, with a simulated uniformity coefficient of 0.092 and an experimental value of 0.068. Surface figure compensation simulations and experiments show that under the optimal speed ratio, the dwell time is most stable, and the simulated compensation accuracy is the highest. Polishing experiments reduce the peak-to-valley (γPV) value of aspheric glass lenses from 6.275 3 μm to 0.220 3 μm, and the root-mean-square (γRMS) value from 1.949 5 μm to 0.036 4 μm. Repeated experiments further verify these results, reducing the γPV value from 1.432 μm to 0.247 8 μm and γRMS from 0.387 9 μm to 0.036 7 μm. Additionally, surface figure compensation tests on another lens demonstrate a γPV reduction from 1.110 1 μm to 0.188 2 μm and γRMS from 0.273 4 μm to 0.032 2 μm, further confirming the effectiveness of the surface figure compensation method.
Using a speed ratio of 1 as the optimal process parameter enhances the Gaussian characteristics of the material removal profile and improves the uniformity of overall material removal. Compared with other speed ratios, a ratio of 1 produces surface figure compensation dwell times that are smoother and more closely match the pre-polishing surface figure error, enabling more accurate correction of the targeted surface deviations. This results in higher and more stable surface figure accuracy. The findings demonstrate the effectiveness of the optimal speed ratio in improving aspheric glass lens surface figure precision while ensuring stable dwell time control.
关键词
非球面玻璃镜片 /
转速比 /
去除函数廓形 /
高斯分布 /
驻留时间控制 /
面型精度
Key words
aspheric glass lens /
relative speed ratio /
removal function profile /
Gaussian distribution /
dwell time control /
surface form accuracy
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基金
广东省科技重大专项“璀璨行动”项目（CC/XM-202401ZJ0501）; 中山市第十批创新科研团队项目（CXTD2023008）
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