目的 均热板虽具高效导热和结构紧凑等优势,但其封装不可视性限制了相变机理研究。方法 前期利用激光刻蚀溅射工艺,在铝板表面制备了毛细性能优异的双结构复合沟槽（Dual-Shape Hybrid Groove, DSHG）吸液芯,以去离子水为工作液体,组装成均热板。通过吸液芯的结构优化和可视化平台,观测气液动态并评估传热性能。使用该平台,改变均热板的方向与充液率,研究其液体蒸发情况和液位变化,并与均热板传热性能对比,验证可视化平台的可靠性。结果 DSHG能够显著提升吸液芯毛细输运性能,使腔体内形成连续而均匀的补液通道,提高蒸发效率。充液率过大,使液面升高,减少输运距离,同时也造成空腔体积减小,淹没蒸发区域;充液率过小,输运距离变长,随着功率的增加,易出现烧干现象。均热板在逆重力、水平和顺重力放置时,蒸发性能最优的充液率分别为45%、30%和15%。结论 不同放置方向下的最优充液率由液位位置与蒸汽区形成情况共同影响。传热性能结果与可视化观察结果高度一致,验证了可视化平台的可靠性,为均热板内部相变行为的研究提供了有效研究途径。
Abstract
Vapor chambers offer high thermal conductivity and compact configuration, making them suitable for high heat-flux dissipation; however, their sealed and non-transparent structure prevents direct observation of internal two-phase flow and phase-change mechanisms. To address this issue, a dual-shape hybrid groove (DSHG) structure with excellent capillary performance is fabricated on an aluminum substrate by laser etching-sputtering. Under fixed laser-processing parameters, including pulse energy, scanning speed, scan spacing, and number of scans, the structure shows good reproducibility and can be stably formed with a dual-scale composite surface morphology characterized by high surface roughness and open porous features. The DSHG achieves a capillary rise height of 200 mm within 85 s, with an average rise velocity of 24 mm/s during the first 2 s. A vapor chamber is then assembled with deionized water as the working fluid. With the optimized wick structure, a dedicated visualization platform is established to enable real-time observation of liquid return, vapor generation, and vapor-liquid interface evolution inside the chamber, while systematically evaluating its heat-transfer performance.
Based on this platform, the effects of orientation, filling ratio, and wick structure on liquid evaporation behavior and liquid-level evolution are investigated and compared with the overall thermal-performance results to verify the reliability of the visualization method. The results further show that under the 90° anti-gravity orientation, the liquid level decreases markedly, and the condensed droplets at the evaporation section are significantly reduced, indicating that liquid replenishment gradually becomes restricted. For samples with filling ratios of 30% and 45%, condensed droplets can still be continuously generated at the evaporation section when the heating power reaches 15.8 W, demonstrating good liquid replenishment capability. Under the horizontal orientation, the liquid amount at a 15% filling ratio decreases noticeably, and the maximum sustainable heating power is 15.8 W, beyond which dry-out readily occurs. At a filling ratio of 30%, the liquid distribution remains sufficient at 19.2 W, with liquid reserves retained along the peripheral regions to replenish evaporation loss in a timely manner. In contrast, at a filling ratio of 45%, excessive retained liquid reduces the vapor-space volume and weakens the phase-change process. Under the 90° gravity-assisted orientation, the vapor chamber with a 15% filling ratio sustains a maximum heating power of 19.2 W, and a large number of condensed droplets are generated at the evaporation section, indicating the best evaporation performance. For the sample with a 30% filling ratio, when the heating power reaches 22.8 W, approximately half of the evaporation section is immersed in liquid, resulting in slightly inferior evaporation performance. For the sample with a 45% filling ratio, excessive liquid causes the liquid level to flood the heating region, leading to boiling at the evaporation section and the generation of numerous bubbles, while the amounts of vapor and condensed droplets are reduced, indicating poor phase-change performance. The optimal filling ratio of the vapor chamber varies with orientation. Under the corresponding operating conditions, the minimum thermal resistances are 1.25, 1.27, and 1.09 ℃/W, while the maximum effective thermal conductivity reaches 2 142.85, 2 109.11, and 2 457.4 W/(m·K), respectively. Compared with the vapor chamber using an unetched aluminum plate, the DSHG vapor chamber exhibits a more uniform liquid distribution along the periphery of the chamber, whereas the liquid in the unetched aluminum plate chamber is mainly concentrated on one side, indicating that the DSHG structure possesses stronger liquid-transport capability. In the vapor chamber with the unetched aluminum plate, only a small amount of condensate forms, while pronounced boiling and extensive bubble adhesion appear at the evaporation section, indicating that vapor generation and phase-change heat transfer are restricted. By contrast, the liquid distribution in the copper-mesh wick vapor chamber is also nonuniform, and a large number of isolated bubbles readily form inside the chamber and further evolve into local vapor regions, thereby impairing the heat-transfer performance.
Overall, the optimal filling ratio under different orientations is governed by the combined effects of liquid-level distribution and vapor-region formation. The good agreement between the thermal-performance measurements and visualization observations confirms the accuracy and applicability of the visualization platform, providing a powerful tool and new insight for investigating the internal phase-change mechanisms of grooved vapor chambers.
关键词
双结构复合沟槽 /
吸液芯 /
激光刻蚀溅射 /
可视化 /
均热板 /
传热性能
Key words
dual-shape hybrid groove /
wick /
laser etch-sputtering /
visualization /
vapor chamber /
thermal performance
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基金
湖北省重点研发计划项目（2025BAB045,2025BAB108）; 湖北省轻工业绿色材料重点实验室开放基金（202107A03）
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