靶磁场强度对电弧离子镀Cr涂层的组织结构及性能影响

李子浩, 冯长杰, 迟云飞, 靳宗翰, 张宇迪, 王赫男, 李明升

表面技术 ›› 2026, Vol. 55 ›› Issue (10) : 81-91.

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表面技术 ›› 2026, Vol. 55 ›› Issue (10) : 81-91. DOI: 10.16490/j.cnki.issn.1001-3660.2026.10.007
腐蚀与防护

靶磁场强度对电弧离子镀Cr涂层的组织结构及性能影响

  • 李子浩1, 冯长杰1,*, 迟云飞1, 靳宗翰1, 张宇迪1, 王赫男1, 李明升2
作者信息 +

Effect of Target Magnetic Field Intensity on the Microstructure and Properties of Arc Ion Plated Cr Coatings

  • LI Zihao1, FENG Changjie1,*, CHI Yunfei1, JIN Zonghan1, ZHANG Yudi1, WANG Henan1, LI Mingsheng2
Author information +
文章历史 +

摘要

目的 优化电弧离子镀Cr涂层制备工艺,提高涂层的力学性能与耐蚀性能。方法 利用电弧离子镀技术,通过设置不同梯度靶材表面磁场强度,在40CrNi合金钢表面制备Cr涂层。通过SEM分析Cr涂层表面、截面与磨痕形貌的微观结构,通过X射线衍射仪分析涂层的物相组成。借助显微硬度计、摩擦磨损试验机以及划痕测试仪测试Cr涂层硬度、摩擦磨损性能以及涂层与基体的结合强度。使用电化学工作站进行极化实验测试涂层的耐蚀性能。系统分析靶面磁场强度对Cr涂层的微观结构、力学性能与耐蚀性能的影响。结果 随着靶面磁场强度由3 Gs增加到12 Gs,涂层表面粗糙度与大颗粒数量先减少后增加,涂层的沉积速率先增大后减小,涂层的晶粒度先减小后增大。当靶面磁场强度为9 Gs时,Cr涂层的最大硬度为470.84HV0.05;涂层的摩擦因数与磨损量最低,分别为0.42和1.06×10-7 mm3/(N×m);涂层与基体的结合强度最高,为40.3 N;自腐蚀电位最高,为76.1 mV,自腐蚀电流密度最低为7.57×10-10 A/cm2结论 通过改变靶面磁场强度,可以调控Cr涂层的微观结构,可以细化晶粒,减少大颗粒数量,所制得的Cr镀层均结构组织致密,没有明显孔洞等缺陷,可以提高涂层的硬度、增强耐磨性能和耐蚀性能。当靶面磁场强度为9 Gs时,Cr涂层表面缺陷最少,涂层的力学性能和耐蚀性能达到最佳。

Abstract

Cr coatings fabricated via physical vapor deposition (PVD) technology have emerged as critical materials for metal surface protection owing to their outstanding mechanical properties and corrosion resistance. However, variations in fabrication processes led to notable differences in coating properties. The main factors that affect the coating quality include different deposition biases, different deposition temperatures, and different magnetic field intensities on the target surface, etc. To improve the preparation process of chromium Cr coatings and strengthen their mechanical properties and corrosion resistance, the work aims to study the effect of the target magnetic field on the structure and properties of arc ion-plated chromium coatings. By using arc ion plating technology and varying the magnetic field intensity on the surface of the target material, a Cr coating was deposited on the surface of 40CrNi alloy steel. The surface and cross-sectional microstructures as well as the wear scar morphology of the Cr coating were systematically analyzed with scanning electron microscopy, while the phase composition of the coating was characterized by X-ray diffraction. The mechanical properties of the Cr coating, including hardness, friction coefficient, and wear resistance, along with the interfacial bonding strength between the coating and substrate, were systematically evaluated through microhardness testing, tribological analysis, and scratch adhesion testing. The corrosion resistance of the coating was evaluated through electrochemical testing methods. Then, the effect of magnetic field strength on the target surface on the microstructure evolution, mechanical properties, and corrosion resistance of Cr coatings was systematically analyzed. The results showed that as the magnetic field strength on the target surface increased from 3 Gs to 12 Gs, the surface roughness of the coating and the number of large particles on the coating surface initially decreased and then increased, the coating deposition rate firstly rose and subsequently declined, and the grain size of the coating exhibited an initial reduction followed by an increase. The wear resistance and corrosion resistance of the coating showed a trend of first increasing and then decreasing as the magnetic field intensity increased from 3 Gs to 12 Gs. When the magnetic field strength on the target surface was 9 Gs, the Cr coating achieved a maximum hardness of 470.84HV0.05. Under this condition, the coating exhibited the lowest friction coefficient (0.42) and wear rate (1.06×10-7 mm³/(N·m)), along with the highest bonding strength to the substrate (40.3 N). Additionally, the self-corrosion potential reached its maximum value of 76.1 mV, while the self-corrosion current density dropped to its minimum value of 7.57×10-10 A/cm². It is concluded that by adjusting the magnetic field strength on the target surface, the microstructure of the Cr coating can be effectively controlled, which can refine the grains, reduce the number of large particles, so the resulting Cr coatings exhibit a relatively dense structure without obvious defects such as pores and with hardness, wear resistance and corrosion resistance improved. When the magnetic field strength on the target surface is 9 Gs, the coating exhibits the fewest surface defects. At the same time, the mechanical properties and corrosion resistance of the coating have both reached the optimal level.

关键词

电弧离子镀 / 靶面磁场强度 / Cr涂层 / 微观结构 / 力学性能 / 耐蚀性能

Key words

arc ion plating / magnetic field strength on target surface / Cr coating / microstructure / mechanical properties / corrosion resistance

引用本文

导出引用
李子浩, 冯长杰, 迟云飞, 靳宗翰, 张宇迪, 王赫男, 李明升. 靶磁场强度对电弧离子镀Cr涂层的组织结构及性能影响[J]. 表面技术. 2026, 55(10): 81-91
LI Zihao, FENG Changjie, CHI Yunfei, JIN Zonghan, ZHANG Yudi, WANG Henan, LI Mingsheng. Effect of Target Magnetic Field Intensity on the Microstructure and Properties of Arc Ion Plated Cr Coatings[J]. Surface Technology. 2026, 55(10): 81-91
中图分类号: TG144    TB331   

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基金

沈阳航空航天大学引进人才科研启动基金资助(19YB05)

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