目的 采用阴极电弧技术在316L不锈钢表面制备了一种以TiN打底的TiAlN/TiAlCN多层涂层,研究不同退火温度和退火气氛对TiAlCN多层涂层的微观结构、机械性能和摩擦学性能的影响。方法 TiAlN/TiAlCN多层涂层在马弗炉中分别进行不同气氛（Ar和N2）和不同温度（400 ℃、600 ℃和800 ℃）的退火处理;采用扫描电子显微镜（SEM）、X射线衍射仪（XRD）、拉曼光谱仪等研究多层涂层的微观结构和物相组成;借助纳米压痕仪表征多层膜的机械性能;最后通过摩擦磨损试验机、SEM、拉曼光谱仪、能谱仪（EDS）和白光干涉仪评估TiAlN/TiAlCN多层涂层的摩擦磨损行为和机理。结果 TiAlN/TiAlCN多层涂层主要由(Ti,Al)(C,N)相构成。随着退火温度的升高,涂层的（220）晶面衍射峰不断朝着高角度方向移动,甚至分裂,而且TiAlCN涂层的ID/IG均先增大后减小,在600 ℃达到最大。TiAlN/TiAlCN多层涂层在N2氛围下退火处理后的表面质量更好,且在N2氛围中退火涂层的晶粒尺寸小于Ar环境,这主要归因于N2环境能抑制涂层退火过程中晶粒尺寸的长大,进而提高涂层的机械性能。摩擦磨损后,N2氛围下退火的涂层的磨损率在600 ℃退火处理时达到最小值,为0.72×10-5 mm3/N·m,而在Ar环境下退火的涂层磨损率较高,这可能是由于N2环境更利于团聚形成a-C结构,并且增强sp3-C向sp2-C转化程度。结论 TiAlN/TiAlCN多层涂层在Ar和N2气氛下退火处理后,其耐磨性均有所提高,而且与Ar环境下相比,TiAlN/TiAlCN多层涂层在N2环境退火后的性能更好。
Abstract
Due to the high hardness and good self-lubricating property, TiAlCN coatings can be applied in high-speed cutting and non-lubricating working environments. However, the service environment is becoming increasingly demanding, which also places higher requirements on the performance of the coating. Although the development of TiAlN/TiAlCN multilayer coatings can enhance the mechanical properties and wear resistance of the coatings, the multilayer structure cannot completely eliminate the numerous challenges faced by traditional material coatings in friction and wear, such as large residual stress in the coating, susceptibility to deformation and cracking, and limited mechanical properties. These limitations restrict the further wide application of the coating in tribological properties. Therefore, annealing, as an effective approach to release a large amount of accumulated stress within the multilayer coating, is chosen to further enhance the mechanical and frictional performance of TiAlN/TiAlCN multilayer coatings.
On this basic, the work aims to investigate how the annealing temperature and atmosphere affect the microstructure and frictional performance of TiAlN/TiAlCN multilayer coatings. Herein, the TiAlN/TiAlCN multilayer coatings were prepared on the substrate (316L stainless steel) by the cathodic arc technology. Subsequently, these coatings were subjected to annealing at 400 ℃, 600 ℃, and 800 ℃ under the Ar and N2 atmospheres, respectively. The phase constituents, topographies, and microstructure of the coatings were explored via X-ray diffractometer (XRD), scanning electron microscopy (SEM), Raman spectrometer, etc. The mechanical properties of the multilayer coatings were characterized by a nanoindentation instrument. The frictional behavior and mechanism of the TiAlN/TiAlCN multilayer coatings were evaluated by a wear testing machine, SEM, Raman spectrometer, energy dispersive spectrometer (EDS), and white light interferometer.
The results showed that the multilayer coatings were mainly composed of (Ti,Al)(C,N) phase. With the increase of the annealing temperature, the (220) diffraction peak positively shifted and even split. Moreover, the ID/IG of the TiAlCN coatings first increased and then decreased, reaching the maximum at 600 ℃. The surface quality of the coatings annealed in N2 atmosphere was better than that of the coatings annealed in Ar atmosphere, and the grain size of the former was smaller than that of the latter. This was contributed to the fact that the N2 could inhibit the growth of grain size during the annealing process, thereby improving the mechanical properties (including the hardness, modulus, and toughness) of the coatings. Besides, the wear rate of the coating annealed in N2 atmosphere reached its minimum value at 600 ℃, being 0.72×10-5 mm3/N·m. Whereas, the coating annealed in Ar atmosphere exhibited relatively poor wear resistance. This phenomenon might be due to the N2 being more conducive to the formation of the a-C structure and enhancing the transformation of sp3-C to sp2-C.
In summary, after the annealing in Ar and N2 atmospheres, the mechanical properties and wear resistance of the coatings are enhanced. Moreover, compared with the Ar atmosphere, the mechanical properties and wear-resisting capacity of the TiAlN/TiAlCN multilayer coating after annealing in N2 atmosphere are better. This work provides theoretical and technical support for the further preparation of high-performance TiAlCN coatings and expands their application in harsh cutting environments.
关键词
TiAlN/TiAlCN /
多层涂层 /
退火 /
机械性能 /
摩擦学性能
Key words
TiAlN/TiAlCN /
multilayer coating /
annealing /
mechanical property /
frictional performance
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基金
上海市优秀技术带头人计划资助（22XD1434500）
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