目的 微放电效应是导致高功率航天微波器件在轨失效的关键因素之一。本研究旨在阐明非晶态碳（Amorphous Carbon, a-C）薄膜通过调控铜（Cu）表面二次电子发射（Secondary Electron Emission, SEE）特性以抑制微波器件微放电效应的作用机制,并量化其在平行平板与同轴传输线中的抑制效果。方法 采用直流磁控溅射技术在Cu基底上沉积a-C薄膜;测量分析Cu与a-C/Cu的二次电子发射系数（Secondary Electron Yield, SEY）及二次电子能谱（Secondary Electron Spectrum, SES）;基于Furman二次电子发射理论,建立a-C/Cu的Monte Carlo模拟模型,预测其二次电子发射行为;利用CST Studio Suite构建平行平板和同轴传输线模型,研究a-C薄膜对微放电阈值电压的影响。结果 厚度为（1.27±0.05）μm的a-C薄膜可以使Cu的SEY最大值从2.18降至1.65,第一临界能量由36 eV提高至58 eV,第二临界能量由2 843 eV降至1 000 eV;SES本征峰强度与面积分别衰减了44%与33%。在f×d=2~9 GHz·mm频段内,a-C薄膜使平行平板模型的微放电敏感区间压缩了42.3%。当f×d=3 GHz·mm时,下阈值电压从237.7 V升高至280.42 V（+17.9%）,上阈值电压从898.89 V降低至671.34 V（-25.3%）;同轴传输线模型呈现相似变化趋势,其下、上阈值电压分别变化+11.29 V和-60.56 V。结论 a-C薄膜可显著抑制Cu的二次电子发射,有效缩小平行平板与同轴传输线结构的微放电敏感区间。该研究为航天微波器件提供了一种低成本、可扩展的表面改性方案,对提升器件在轨抗微放电能力具有重要应用价值。
Abstract
Multipactor is one of the key factors leading to on-orbit failure of high-power spaceflight microwave devices. The work aims to elucidate the mechanism of how amorphous carbon (a-C) thin films modulate the secondary electron emission (SEE) properties of copper (Cu) surfaces in order to suppress the multipactor effect in microwave devices and to quantify its suppression effect in parallel flat plates and coaxial transmission lines. The direct current magnetron sputtering technique was used to deposit a-C thin films on Cu substrates. Then, the secondary electron yield (SEY) of Cu and a-C/Cu samples was measured by the bias current method, respectively, and the secondary electron spectrum (SES) at 300 eV incident electron energy was recorded with the electrostatic electron spectroscopy technique. Based on the Furman theory, a Monte Carlo model was developed to predict the SEE properties of Cu and a-C/Cu. Subsequently, CST Studio Suite electromagnetic simulation software was used to construct parallel flat plate and coaxial transmission line structure models. The effect of a-C film on the threshold voltage of the multipactor was investigated by depositing it on the inner wall of the microwave structure. The thickness of the deposited a-C film layer was (1.27 ± 0.05) μm, measured by scanning electron microscope (SEM). This coating reduced the maximum value of SEY for Cu from 2.18 to 1.65, which was a 24.1% reduction. The first critical energy increased from 36 eV to 58 eV, and the second critical energy decreased from 2 843 eV to 1 000 eV. Meanwhile, the intensity and area of the intrinsic peak of the SES decayed by 44% and 33%, respectively. By comparing the deviation between the Monte Carlo predicted SEY results and the experimental results, it was found that the maximum error of Cu occurred at an incident energy of 800 eV, with an error value of 14%, while the maximum error of a-C/Cu occurred at an incident energy of 1 000 eV, with an error value of 4%. The model fitted well with experimental results. CST simulations showed that the a-C film compressed the multipactor sensitive interval of the parallel flat plate model by 42.3% in the frequency range of 2 to 9 GHz·mm. Specifically, when f × d= 3 GHz·mm, the lower threshold voltage increased by 17.9% from 237.7 V to 280.42 V, and the upper threshold voltage decreased by 25.3% from 898.89 V to 671.34 V. The coaxial transmission line model showed a similar trend, with the lower and upper threshold voltages varying by +11.29 V and -60.56 V, respectively. The results show that the a-C thin film can reduce the SEY of Cu materials, which in turn has a significant suppression effect on the SEE of Cu. The film results in a significant reduction of the multipactor sensitivity interval for two typical microwave structures, a parallel flat plate and a coaxial transmission line. It has been demonstrated that a-C thin films, as a low-cost and scalable surface modification strategy, can effectively enhance the anti-multipactor capability of microwave devices in extreme spatial environments. The combination of experiments and simulations provides a strong scientific basis for understanding and suppressing multipactor effects and provides theoretical support for the surface modification design of spacecraft microwave devices.
关键词
微放电 /
非晶态碳薄膜 /
二次电子发射 /
Furman模型 /
Monte Carlo方法
Key words
multipactor /
amorphous carbon film /
secondary electron emission /
Furman model /
Monte Carlo method
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基金
空间微波通信全国重点实验室开放基金（2024-CXPT-GF-JJ-013-02）; 西安市科技计划项目（24GDW0023）; 陕西省自然科学基础研究计划（2023-JC-YB-004）
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