目的 应用化学机械研磨加工技术旨在高效获得绝缘轴承Al2O3-TiO2复合陶瓷涂层高质低损表面,从而提高其极端电场工况环境下抗电蚀损伤能力,延长新能源汽车、风电、高铁等领域电机服役寿命。方法 采用三角形沟槽阵列金刚石结构化磨盘与碱性反应液相结合开展陶瓷涂层的化学机械研磨加工试验研究;应用XPS测试验证化学反应,应用纳米压痕测试获得反应软质层的机械性能;基于多尺度接触力学理论构建表面粗糙度的数学模型并进行仿真预测。结果 化学反应后的陶瓷涂层表面硬度和弹性模量均显著降低;试验和仿真结果高度一致,验证了数学模型的有效性;在磨料粒径3 μm、加载压力14 N和磨盘转速160 r/min条件下进行化学机械研磨加工,可使陶瓷涂层表面粗糙度在5 min内从初始平均Ra 2.864 μm快速减少至平均Ra 0.285 μm,最终20 min后达到平均Ra 0.108 μm。此外,与传统研磨形成的最大径向微裂纹尺寸4.85 μm相比较,化学机械研磨可实现表面近无微裂纹。结论 本文所述加工方法可高效获得绝缘轴承Al2O3-TiO2复合陶瓷涂层的高质低损表面,机械去除与化学反应的协同作用至关重要,化学反应、磨料粒径、加载压力和磨盘转速对材料去除率、表面粗糙度和微裂纹有显著影响。
Abstract
Equipment such as new energy vehicles, rail traffic, and wind power generation often work under the extreme electric conditions with high frequency and high voltage. To ensure the insulation performance of bearings, resist the electrical erosion damage on the raceway, and extend the service life of bearings and motors, the high-quality and low-damage surface of Al2O3-TiO2 composite ceramic coatings on the insulation bearing are highly demanded. In this paper, a novel chemical and mechanical lapping method for the Al2O3-TiO2 composite ceramic coating was developed by combining the diamond abrasives pad structured with the triangular grooves array and the NaOH alkaline solution. The material removal mechanism and the surface morphology of the coating were investigated from the perspective of chemical and mechanical synergy, through the X-ray Photoelectron Spectroscopy tests, the nano-indentation test, the theoretical modeling and simulation of roughness, and the lapping experiments.
The coating was fabricated on the bearing's outer ring by plasma thermal spraying with Al2O3 and TiO2 composite powders, which contained the Al, Ti and O elements respectively with weight proportions of 34.54wt.%, 2.17wt.% and 63.29wt.%. The Al2O3 and TiO2 components were distributed on the coating's surface respectively with volume proportions of 86 and 14%. The samples were immersed in the NaOH solution for 24 hours, the chemical reaction between Al2O3 and NaOH solution was demonstrated by X-ray Photoelectron Spectroscopy tests, indicating in the spectrum of element O that the content of the Al-O bond decreased from the original 48.39% to 28.52% after the reaction, while the content of the Al-OH bond increased from the original 0 to 47.19% after the reaction. After that, the nano-indentation tests were conducted on the Al2O3 and TiO2 components of the coating before and after the chemical reaction, respectively. It was revealed that the hardness 70.64 GPa and Young's modulus 506.93 GPa of Al2O3 on the original surface were reduced to 18.31 GPa and 112.03 GPa on the chemically reacted surface, respectively, demonstrating the generation of a softened layer due to the chemical reaction for the ductile removal of the brittle coating.
A simulation and prediction mathematical model of surface roughness was established for the chemical and mechanical lapping of Al2O3 and TiO2 composite ceramic coatings, based on the multi-scale rough contact mechanics theory which was divided in sections of macro-scale contact, micro-scale contact, material removal and roughness modeling, considering the mechanical properties of different components on the coating surface according to the nano-indentation tests. This theoretical model was verified in the experimental evolution of surface roughness with time.
The ductile removal of brittle Al2O3 component with low damage by chemical and mechanical lapping was demonstrated experimentally. In addition, the influences of abrasives size, loading force and abrasives pad's rotational speed on the surface morphology and roughness as well as the material removal rate were investigated experimentally. Finally, under conditions of abrasives size 3 μm, loading force 14 N and pad's speed 160 r/min, the workpiece's surface roughness was efficiently reduced from the initial avg. Ra 2.864 μm to the final avg. Ra 0.285 μm within 5 minutes, as well as reached avg. Ra 0.108 μm after 20 minutes. Compared with the radial micro cracks in a maximum size of 4.85 μm induced by the traditional lapping, the chemical and mechanical lapping could achieve nearly no micro cracks on the surface. It is concluded that the synergistic effect of mechanical removal and chemical reaction is crucial to obtain a good surface of the coating, and the loading force and the pad's speed can be regarded as important adjustment parameters; besides, the factors including chemical reaction, abrasives size, loading force and abrasives pad's rotational speed have considerable impacts on the material removal rate, surface roughness and morphology.
关键词
陶瓷涂层 /
化学机械研磨 /
粗糙度模型 /
多尺度接触 /
纳米压痕 /
微裂纹
Key words
ceramic coating /
chemical and mechanical lapping /
roughness model /
multi-scale contact /
nanoindentation /
micro crack
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参考文献
[1] 唐虎娇. 绝缘轴承产品绝缘涂层设计方法及检测分析[J]. 金属加工(热加工), 2022(4): 88-91.
TANG H J.Design Method and Detection Analysis of Insulating Coating of Insulating Bearing Products[J]. MW Metal Forming, 2022(4): 88-91.
[2] LOU Z H, SONG C F, REN Y L, et al.Formation of Corrugated Damage on Bearing Race under Different AC Shaft Voltages[J]. Materials, 2024, 17(4): 859.
[3] 奚强, 赵志晓, 于晓凯, 等. 轨道交通牵引电机轴承电流密度计算[J]. 轴承, 2023(4): 21-25.
XI Q, ZHAO Z X, YU X K, et al.Calculation on Current Density of Traction Motor Bearings for Rail Transit[J]. Bearing, 2023(4): 21-25.
[4] 卜珍宇, 赵晓琴, 郭向东, 等. 电机轴承防护措施及Al2O3陶瓷绝缘涂层研究现状[J]. 表面技术, 2021, 50(5): 51-59.
BU Z Y, ZHAO X Q, GUO X D, et al.Electromotor Bearing Protection Measures and Research Status of Al2O3 Ceramic Coating[J]. Surface Technology, 2021, 50(5): 51-59.
[5] 刘朝斌, 李伟, 尚朋飞, 等. 高频交变电场作用下静态绝缘轴承中润滑脂的老化行为[J]. 轴承, 2024(5): 146-155.
LIU C B, LI W, SHANG P F, et al.Aging Behavior of Lubricating Grease in Stationary Insulated Bearings under High-Frequency Alternating Electric Field[J]. Bearing, 2024(5): 146-155.
[6] 李全伟, 杨斌, 王海, 等. 风电绝缘轴承表面防护膜的制备及其绝缘性能分析[J]. 轴承, 2023(4): 15-20.
LI Q W, YANG B, WANG H, et al.Analysis on Preparation and Insulation Performance of Surface Protective Film of Wind Turbine Insulated Bearings[J]. Bearing, 2023(4): 15-20.
[7] 魏坤鹏, 刘月明, 褚明星. 牵引电机轴承绝缘涂层绝缘性能与力学性能试验分析[J]. 轴承, 2023(4): 9-14.
WEI K P, LIU Y M, CHU M X.Experimental Analysis on Insulation and Mechanical Properties of Insulation Coating of Traction Motor Bearings[J]. Bearing, 2023(4): 9-14.
[8] 高立明, 贾书海, 张国龙, 等. 基于改进Faster R-CNN的绝缘轴承表面缺陷检测方法[J]. 轴承, 2023(4): 1-8.
GAO L M, JIA S H, ZHANG G L, et al.Detection Method for Surface Defects of Insulated Bearings Based on Improved Faster R-CNN[J]. Bearing, 2023(4): 1-8.
[9] ZHOU L B, KAWAI S, HONDA M, et al.Research on Chemo-Mechanical-Grinding (CMG) of Si Wafer[J]. Journal of the Japan Society for Precision Engineering, 2002, 68(12): 1559-1563.
[10] WU K, ZHOU L B, ONUKI T, et al.Study on the Finishing Capability and Abrasives-Sapphire Interaction in Dry Chemo-Mechanical-Grinding (CMG) Process[J]. Precision Engineering, 2018, 52: 451-457.
[11] WU K, TOUSE D, ZHOU L B, et al.Chemo-Mechanical Grinding by Applying Grain Boundary Cohesion Fixed Abrasive for Monocrystal Sapphire[J]. Precision Engineering, 2021, 70: 110-116.
[12] 陶占春. Al2O3陶瓷化学机械磨削用磨具的研制及性能研究[D]. 大连: 大连理工大学, 2010.
TAO Z C.The development and performance of chemical- mechanical grinding tools for Al2O3 ceramics[D]. Dalian: Dalian University of Technology, 2010.
[13] ZHANG Z Y, LIU J, HU W, et al.Chemical Mechanical Polishing for Sapphire Wafers Using a Developed Slurry[J]. Journal of Manufacturing Processes, 2021, 62: 762-771.
[14] XIE J C, SHI F, WANG S S, et al.Mechanisms of Force Magnetic Shear Combined with Chemical Rheological Polishing (FMS-CRP): A Case Study in Sapphire Processing[J]. Journal of Manufacturing Processes, 2025, 140: 181-203.
[15] ZHOU M F, ZHONG M, XU W H, et al.Effects of Frequency on the Performance of Ultrasonic Vibration Assisted Chemical Mechanical Polishing for Sapphire[J]. ECS Journal of Solid State Science and Technology, 2024, 13(10): 104007.
[16] YAO W F, CHU Q Q, LYU B H, et al.Modeling of Material Removal Based on Multi-Scale Contact in Cylindrical Polishing[J]. International Journal of Mechanical Sciences, 2022, 223: 107287.
[17] WANG L, ZHOU P, YAN Y, et al.Micro-Scale Contact Behavior and Its Effect on the Material Removal Process during Chemical Mechanical Polishing[J]. Tribology International, 2021, 156: 106831.
[18] GUO J, SHI X L, SONG C P, et al.Theoretical and Experimental Investigation of Chemical Mechanical Polishing of W-Ni-Fe Alloy[J]. International Journal of Extreme Manufacturing, 2021, 3(2): 025103.
[19] MENG F W, CUI Z J, LIANG Y D, et al.Multiscale Model of Material Removal for Ultrasonic Assisted Polishing of Cylindrical Surfaces[J]. Tribology International, 2025, 202: 110383.
[20] ZHANG T Q, WANG Z X, YU T B, et al.Modeling and Prediction of Generated Local Surface Profile for Ultrasonic Vibration-Assisted Polishing of Optical Glass BK7[J]. Journal of Materials Processing Technology, 2021, 289: 116933.
[21] 马廉洁, 李红双. 脆性材料机械加工表面粗糙度模型的研究进展[J]. 中国机械工程, 2022, 33(7): 757-768.
MA L J, LI H S.Research Progresses on Surface Roughness Model of Brittle Material Machining[J]. China Mechanical Engineering, 2022, 33(7): 757-768.
[22] 宿崇, 郭品方. 氧化铝陶瓷磨削用砂轮形貌建模与表面粗糙度仿真[J]. 大连交通大学学报, 2024, 45(6): 26-33.
SU C, GUO P F.Research on Grinding Wheel Modeling Method and Finite Element Simulation[J]. Journal of Dalian Jiaotong University, 2024, 45(6): 26-33.
[23] COOK R F.Fracture Mechanics of Sharp Scratch Strength of Polycrystalline Alumina[J]. Journal of the American Ceramic Society, 2017, 100(3): 1146-1160.
[24] BORGESE L, GELFI M, BONTEMPI E, et al.Young Modulus and Poisson Ratio Measurements of TiO2 Thin Films Deposited with Atomic Layer Deposition[J]. Surface and Coatings Technology, 2012, 206(8/9): 2459-2463.
[25] MIYAZAKI H, YOSHIZAWA Y I.Refined Measurements of Indentation Fracture Resistance of Alumina Using Powerful Optical Microscopy[J]. Ceramics International, 2014, 40(2): 2777-2783.
[26] KUMAR C A V, RAJADURAI J S. Influence of Rutile (TiO2) Content on Wear and Microhardness Characteristics of Aluminium-Based Hybrid Composites Synthesized by Powder Metallurgy[J]. Transactions of Nonferrous Metals Society of China, 2016, 26(1): 63-73.
[27] YU H Y, ZHANG B Y, PAN X L, et al.Effect of Oxalate on Seed Precipitation of Gibbsite from Sodium Aluminate Solution[J]. Journal of Central South University, 2020, 27(3): 772-779.
[28] SIPOS P.The Structure of Al(III) in Strongly Alkaline Aluminate Solutions—A Review[J]. Journal of Molecular Liquids, 2009, 146(1/2): 1-14.
[29] GREENWOOD J A, WILLIAMSON J P H. Contact of Nominally Flat Surfaces[J]. Proceedings of the Royal Society of London Series A Mathematical and Physical Sciences, 1966, 295: 300-319.
[30] CIAVARELLA M, GREENWOOD J A, PAGGI M.Inclusion of "Interaction" in the Greenwood and Williamson Contact Theory[J]. Wear, 2008, 265(5/6): 729-734.
[31] CIAVARELLA M.Rough Contacts near Full Contact with a very Simple Asperity Model[J]. Tribology International, 2016, 93: 464-469.
[32] YAO W F, LYU B H, ZHANG T Q, et al.Effect of Elastohydrodynamic Characteristics on Surface Roughness in Cylindrical Shear Thickening Polishing Process[J]. Wear, 2023, 530: 205026.
基金
中国博士后科学基金面上项目（2024M752897）; 浙江省自然科学基金联合基金（LZY23E050002）
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