超快激光玻璃微纳加工技术进展与应用

陈依兰; 吉鹏飞; 鲁意博; 田梦瑶; 赵亮; 陈博; 李欣

doi:10.16490/j.cnki.issn.1001-3660.2025.24.002

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表面技术 ›› 2025, Vol. 54 ›› Issue (24) : 27-49. DOI: 10.16490/j.cnki.issn.1001-3660.2025.24.002

专题—超快激光表面加工

超快激光玻璃微纳加工技术进展与应用

陈依兰^1,2, 吉鹏飞¹, 鲁意博^1,3, 田梦瑶^1,4, 赵亮¹, 陈博¹, 李欣^1,2,*

作者信息 +

Advances and Applications of Ultrafast Laser Glass Micro/Nanofabrication Technology

CHEN Yilan^1,2, JI Pengfei¹, LU Yibo^1,3, TIAN Mengyao^1,4, ZHAO Liang¹, CHEN Bo¹, LI Xin^1,2,*

Author information +

文章历史 +

摘要

玻璃材料凭借其优异的透光性、绝缘性和化学稳定性,在新能源、生物医学及数据存储等高科技领域具有至关重要的应用价值。然而,其固有的高硬高脆特性,使得机械加工方法和传统激光加工方法往往伴随着微裂纹、应力集中和热损伤等加工难题,难以保证加工精度和质量。超快激光技术凭借其超短脉冲宽度、极高峰值功率,能够通过非线性吸收机制对玻璃材料二维表面及三维内部进行高精度、低损伤加工,为解决加工精度不足和内部加工难的问题提供了有效解决方案。本文系统总结了超快激光与玻璃材料的相互作用机制,重点分析了从非线性吸收到多时间尺度的能量弛豫机制等关键性物理过程和涉及的基础科学问题,并详细探讨了时域整形激光加工、空域整形激光加工、超分辨纳米激光加工及超快激光复合加工等关键技术对玻璃加工精度优化效率提升做出的贡献。本文还详细阐述了超快激光加工玻璃技术在光伏、生物医学、微机电及数据存储等前沿领域的最新应用进展。最后,针对该技术当前仍面临的挑战进行总结,并对未来发展趋势进行了展望,旨在为超快激光玻璃加工技术的进一步基础科学研究与工业化应用提供有益的参考。

Abstract

Glass materials are of significant values in high-tech fields such as photovoltaics, biomedicine, microelectromechanical systems (MEMS), and optical data storage, owing to their exceptional optical transparency, insulation properties, and chemical stability. The expanding demands of these fields continually push the requirements for precision, feature miniaturization, and functional integration in glass components. However, their inherent high hardness and brittleness pose severe challenges for high-precision manufacturing. Conventional mechanical processing and long-pulse laser machining are often accompanied by inevitable defects such as micro-cracks, debris, a substantial heat-affected zone (HAZ), and stress concentration, which significantly degrades the performance and service life of glass components. In contrast, ultrafast laser technology, with pulse widths in the femtosecond-to-picosecond range and ultra-high peak power densities, offers a revolutionary solution to glass processing. Relying on nonlinear absorption mechanisms, it enables high-precision, low-damage "cold" processing, thereby effectively suppressing thermal diffusion and collateral damage. The unique light-matter interaction, which confines energy deposition spatially and temporally, is the fundamental reason for its superior capabilities compared to conventional methods.
The work aims to systematically review recent advances in ultrafast laser-based micro/nanofabrication of glass. Firstly, the mechanisms underlying the interaction between ultrafast lasers and glass are outlined. The process originates from nonlinear excitation (multiphoton and tunneling ionization) and avalanche ionization, followed by energy relaxation via multi-timescale electron-phonon coupling. This mechanism allows the laser energy to be confined precisely within the focal volume, enabling high-precision, high-quality surface processing or internal modification. A clear understanding of this multi-stage process is crucial for rationally designing and optimizing laser parameters for specific material modifications.
Then, a comprehensive analysis of key processing techniques developed to overcome the limitations of conventional Gaussian-beam single-spot processing is provided. In terms of temporal shaping, double-pulse and burst-mode strategies are discussed. By adjusting pulse delay and energy distribution, these approaches can suppress plasma-shielding effects and improve the management of heat accumulation, thus enhancing ablation efficiency and welding quality. With respect to spatial shaping, the review covers multi-focus processing and the use of structured light fields (e.g., Bessel and Airy beams). These methods attract considerable attention for enabling high-throughput parallel processing, high-aspect-ratio drilling, and curved cutting. The flexibility provided by beam shaping is the key to translating the fundamental advantages of ultrafast lasers into versatile and practical fabrication tools. To overcome the diffraction limit, three super-resolution strategies, including near-field processing, far-field-induced near-field processing, and pure far-field processing, are examined, with an explanation of how they achieve feature sizes well below the diffraction limit. Furthermore, hybrid methods that combine ultrafast lasers with chemical etching or other laser sources are presented as a means to extend processing capabilities, allowing the fabrication of complex 3D structures and efficient drilling. This synergy often combines the precision of ultrafast lasers with the selectivity or speed of a secondary process, opening new avenues for complex microstructure fabrication.
Finally, specific applications of these techniques in cutting-edge fields are detailed. In photovoltaics, ultrafast lasers are used to create high-quality holes in double-glass modules and to texture surfaces for self-cleaning functionality. In biomedicine, they enable the fabrication of integrated microfluidic chips and highly sensitive surface plasmon resonance (SPR) sensors. For MEMS, the technology supports precision machining and frequency tuning of quartz resonators without damaging the crystal lattice. In data storage, it has made possible high-density, permanent five-dimensional optical storage. The review concludes by summarizing current challenges, such as the trade-off between processing efficiency and accuracy, and outlines future directions aimed at deepening mechanistic understanding, implementing intelligent process control, and advancing toward adaptive ultrafast laser manufacturing.

导出引用

陈依兰, 吉鹏飞, 鲁意博, 田梦瑶, 赵亮, 陈博, 李欣. 超快激光玻璃微纳加工技术进展与应用[J]. 表面技术. 2025, 54(24): 27-49

CHEN Yilan, JI Pengfei, LU Yibo, TIAN Mengyao, ZHAO Liang, CHEN Bo, LI Xin. Advances and Applications of Ultrafast Laser Glass Micro/Nanofabrication Technology[J]. Surface Technology. 2025, 54(24): 27-49

中图分类号： TN249

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