基于原位电镜力学的多物理场原子制造

赵体清; 李意浓; 连易灵; 祝祺; 李嘉祎; 陆洋

doi:10.16490/j.cnki.issn.1001-3660.2025.23.005

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表面技术 ›› 2025, Vol. 54 ›› Issue (23) : 78-91. DOI: 10.16490/j.cnki.issn.1001-3660.2025.23.005

专题—原子级制造

基于原位电镜力学的多物理场原子制造

赵体清^1,2, 李意浓^1,2, 连易灵¹, 祝祺¹, 李嘉祎^1,2, 陆洋^1,2,*

作者信息 +

Multi-physical Field Regulation for Atoms of In-situ Mechanical Electron Microscopy

ZHAO Tiqing^1,2, LI Yinong^1,2, LIAN Yiling¹, ZHU Qi¹, LI Jiayi^1,2, LU Yang^1,2,*

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文章历史 +

摘要

原子制造的关键在于从原子尺度对物质形态及属性进行精准调控,原位透射电镜因其超高的时空分辨率及多物理场辅助调控能力,成为原子制造及观测的重要平台。基于原位电镜对包括力、电、热、光、磁等物理场的原子操控进行了详细综述,主要介绍通过精确控制透射电子显微镜力场大小和方向实现原子冷焊、纳米切削,以及相转变和原子的定向精准操控方法。阐述了驱动电、热、光、磁等其他物理场间接诱导原子扩散与重构的技术,如热场驱动的原子扩散、材料相转变、电场驱动的原子沉积、原子刻蚀和原子定向排布等。最后,介绍微机电系统的引入对低真空、气相甚至液相等复杂环境中的原子操控技术的发展,包括气相反应中界面原子的运动,以及液相反应中原子的定向生长和原子刻蚀。尽管原位电镜作为机理研究的一种手段,仍与大规模原子级制造存在一定距离,但原位电镜作为原子级表征和场调控平台,通过整合气/液/真空环境与多物理场,实现了原子动态过程的超高时空分辨率观测和控制,为大规模原子制造提供了可量化的机理依据和实验参数,成为多能场辅助原子制造的重要工具。

Abstract

Atomic manufacturing relies critically on precisely controlling the forms and properties of matters at the atomic scale. In-situ transmission electron microscopy (TEM) is a powerful platform for atom manufacturing and observation because of its high temporal and spatial resolution, which can be coupled with multiple physical fields. TEM can provide the structure and composition information of samples from the atomic resolution, but its application is often limited to solid samples with a thickness of less than 100 nm. At the same time, the observation of the structure information of solid materials in a vacuum environment is far from meeting the needs of researchers. With the rapid development of information technology and nanofabrication technology, many in-situ electron microscopy characterization methods emerge.
This paper provides a detailed review of atomic manipulation of physical fields including force, electricity, heat, light and magnetism based on in-situ electron microscopy. Besides, it also discusses the change mechanism of materials in a specific atmosphere or solution environment, multiple physical fields are often combined with each other to achieve atomic scale observation and manufacturing under a variety of environments. Firstly, it introduces the precise control methods by precisely controlling the magnitude and direction of the force field of the transmission electron microscope to assist atomic diffusion. Inside transmission electron microscopy, the size and direction of the force field are precisely controlled, and the force is directly applied to the target material, which can realize the auxiliary atomic diffusion and directional accurate manipulation of atoms, such as atomic cold welding, nano-cutting and phase transformation. Not only a single force field can be controlled and applied, but also MEMS (micro electro mechanical system) technology can be used to achieve electro mechanical coupling and thermal mechanical coupling, so as to realize multi-physical field directional atomic manipulation and atomic control. Secondly, the technology of indirectly inducing the diffusion and reconstruction of atoms by driving other physical fields such as electricity, heat, light and magnetism is expounded. Electric, thermal, optical and magnetic drives can indirectly induce atomic diffusion and rearrangement, such as thermal field driven atomic diffusion, material phase transformation, electric field driven atomic deposition, atomic etching and atomic orientation arrangement, apart from these physical fields, studies in the liquid phase, gas phase and vacuum environment prove that the electron beam is also an important factor in the experiment, and reasonable control of the electron beam and its dose helps to achieve accurate manipulation of atoms. Finally, it discusses the development of atomic manipulation techniques in complex environments because of the introduction of micro-electromechanical systems and advances in instrument technology, atomic motion and manipulation can be achieved in the complex multi-field environment such as low vacuum, gas phase, and even liquid phase, atomic manipulation of interface in gas phase reaction, directional growth of atoms and atomic etching during liquid phase reaction are introduced.
In-situ electron microscopy, as a means of mechanism research, still has a certain distance from large-scale atomic-level manufacturing, however, it achieves nano and micrometer-level additive manufacturing of materials at the atomic scale, providing a mechanism and a theoretical basis for larger-scale atomic manufacturing. Specifically, in-situ transmission electron microscopy, as an atomic characterization platform and field regulation platform, opens up a broader atomic regulation space by combining various environments and physical fields. The manufacturing of nanometer and micron scale structures is realized through atomic scale control, which provides a theoretical and experimental basis for subsequent large-scale atomic manufacturing, and will become an important tool to promote multi-energy field-assisted atomic manufacturing.

导出引用

赵体清, 李意浓, 连易灵, 祝祺, 李嘉祎, 陆洋. 基于原位电镜力学的多物理场原子制造[J]. 表面技术. 2025, 54(23): 78-91 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.23.005

ZHAO Tiqing, LI Yinong, LIAN Yiling, ZHU Qi, LI Jiayi, LU Yang. Multi-physical Field Regulation for Atoms of In-situ Mechanical Electron Microscopy[J]. Surface Technology. 2025, 54(23): 78-91 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.23.005

中图分类号： O341

参考文献

[1] WANG W H, GU J N, HE T, et al.Optical Super-Resolution Microscopy and Its Applications in Nano-Catalysis[J]. Nano Research, 2015, 8(2): 441-455.
[2] POPPA H.Heterogeneous Nucleation of Bi and Ag on Amorphous Substrates (In Situ Electron Microscopy Studies)[J]. Journal of Applied Physics, 1967, 38(10): 3883-3894.
[3] LU Y, HUANG J Y, WANG C, et al.Cold Welding of Ultrathin Gold Nanowires[J]. Nat Nanotechnol, 2010, 5(3): 218-224.
[4] DAI G L, WANG B J, XU S, et al.Side-to-Side Cold Welding for Controllable Nanogap Formation from Dumbbell Ultrathin Gold Nanorods[J]. ACS Applied Materials & Interfaces, 2016, 8(21): 13506-13511.
[5] SUN M H, LIAO H G, NIU K Y, et al.Structural and Morphological Evolution of Lead Dendrites during Electrochemical Migration[J]. Scientific Reports, 2013, 3: 3227.
[6] ZENG Z Y, ZHENG W J, ZHENG H M.Visualization of Colloidal Nanocrystal Formation and Electrode-Electrolyte Interfaces in Liquids Using TEM[J]. Accounts of Chemical Research, 2017, 50(8): 1808-1817.
[7] ZENG Z Y, LIANG W I, LIAO H G, et al.Visualization of Electrode-Electrolyte Interfaces in LiPF6/EC/DEC Electrolyte for Lithium Ion Batteries via in Situ TEM[J]. Nano Letters, 2014, 14(4): 1745-1750.
[8] CHEE S W, TAN S F, BARAISSOV Z, et al.Direct Observation of the Nanoscale Kirkendall Effect during Galvanic Replacement Reactions[J]. Nature Communications, 2017, 8(1): 1224.
[9] WANG Z L, KE X X, ZHOU K L, et al.Engineering the Structure of ZIF-Derived Catalysts by Revealing the Critical Role of Temperature for Enhanced Oxygen Reduction Reaction[J]. Journal of Materials Chemistry A, 2021, 9(34): 18515-18525.
[10] LIU Q M, WU D, LI Z A, et al.Photoinduced Multistage Phase Transitions in Ta₂NiSe₅[J]. Nature Communications, 2021, 12(1): 2050.
[11] BARTOLO M, AMARAL J J, HIRST L S, et al.Directed Assembly of Magnetic and Semiconducting Nanoparticles with Tunable and Synergistic Functionality[J]. Scientific Reports, 2019, 9(1): 15784.
[12] GIORGIO S, SAO JOAO S, NITSCHE S, et al.Environmental Electron Microscopy (ETEM) for Catalysts with a Closed E-Cell with Carbon Windows[J]. Ultramicroscopy, 2006, 106(6): 503-507.
[13] GAI P L.Development of Wet Environment TEM (Wet-ETEM) for in Situ Studies of Liquid-Catalyst Reactions on the Nanoscale[J]. Microscopy and Microanalysis, 2002, 8(1): 21-28.
[14] MIRSAIDOV U, PATTERSON J P, ZHENGGUEST H.Liquid Phase Transmission Electron Microscopy for Imaging of Nanoscale Processes in Solution[J]. MRS Bulletin, 2020, 45(9): 704-712.
[15] LIAO H G, NIU K Y, ZHENG H M.Observation of Growth of Metal Nanoparticles[J]. Chemical Communications, 2013, 49(100): 11720-11727.
[16] ROSS F M.Opportunities and Challenges in Liquid Cell Electron Microscopy[J]. Science, 2015, 350(6267): 9886.
[17] CHEN X, LI C, CAO H L.Recent Developments of the in Situ Wet Cell Technology for Transmission Electron Microscopies[J]. Nanoscale, 2015, 7(11): 4811-4819.
[18] NGO T, YANG H.Toward Ending the Guessing Game: Study of the Formation of Nanostructures Using in Situ Liquid Transmission Electron Microscopy[J]. The Journal of Physical Chemistry Letters, 2015, 6(24): 5051-5061.
[19] LI P F, CAO K, GAO L B, et al.Cold Welding Assisted Self-Healing of Fractured Ultrathin Au Nanowires[J]. Nano Express, 2020, 1(2): 020014.
[20] CUI J F, ZHANG Z Y, JIANG H Y, et al.Ultrahigh Recovery of Fracture Strength on Mismatched Fractured Amorphous Surfaces of Silicon Carbide[J]. ACS Nano, 2019, 13(7): 7483-7492.
[21] LI P F, KANG Z, RAO F, et al.Nanowelding in Whole-Lifetime Bottom-up Manufacturing: From Assembly to Service[J]. Small Methods, 2021, 5(10): 2100654.
[22] BANERJEE A, BERNOULLI D, ZHANG H T, et al.Ultralarge Elastic Deformation of Nanoscale Diamond[J]. Science, 2018, 360(6386): 300-302.
[23] DANG C Q, CHOU J P, DAI B, et al.Achieving Large Uniform Tensile Elasticity in Microfabricated Diamond[J]. Science, 2021, 371(6524): 76-78.
[24] SHI Z, DAO M, TSYMBALOV E, et al.Metallization of diamond[J]. Proc Natl Acad Sci U S A, 2020, 117(40): 24634-9.
[25] LI X C, MENG Y, LI W P, et al.Multislip-Enabled Morphing of All-Inorganic Perovskites[J]. Nature Materials, 2023, 22(10): 1175-1181.
[26] ZHANG Z Y, WANG B, KANG R K, et al.Changes in Surface Layer of Silicon Wafers from Diamond Scratching[J]. CIRP Annals, 2015, 64(1): 349-352.
[27] WANG B, ZHANG Z Y, CHANG K K, et al.New Deformation-Induced Nanostructure in Silicon[J]. Nano Letters, 2018, 18(7): 4611-4617.
[28] ZHANG Z Y, CUI J F, ZHANG J B, et al.Environment Friendly Chemical Mechanical Polishing of Copper[J]. Applied Surface Science, 2019, 467: 5-11.
[29] XIE W X, ZHANG Z Y, LIAO L X, et al.Green Chemical Mechanical Polishing of Sapphire Wafers Using a Novel Slurry[J]. Nanoscale, 2020, 12(44): 22518-22526.
[30] WANG L H, LIU P, GUAN P F, et al.In Situ Atomic-Scale Observation of Continuous and Reversible Lattice Deformation beyond the Elastic Limit[J]. Nature Communications, 2013, 4: 2413.
[31] ZHANG J F, LI Y R, LI X C, et al.Timely and Atomic-Resolved High-Temperature Mechanical Investigation of Ductile Fracture and Atomistic Mechanisms of Tungsten[J]. Nature Communications, 2021, 12(1): 2218.
[32] YANG C P, ZHANG B Z, FU L B, et al.Chemical Inhomogeneity-Induced Profuse Nanotwinning and Phase Transformation in AuCu Nanowires[J]. Nature Communications, 2023, 14(1): 5705.
[33] ZHENG X D, HAN W, YANG K, et al. Phase and Polarization Modulation in Two-Dimensional In₂Se₃ via in Situ Transmission Electron Microscopy[J]. Science Advances, 2022, 8(42): eabo0773.
[34] HUANG Y H, NIE M, LI B H, et al.Real-Time Quantitative Electromechanical Characterization of Nanomaterials Based on Integrated MEMS Device[J]. IEEE Sensors Journal, 2023, 23(19): 22592-22599.
[35] SUN Y, ZHAO T Q, LIAO H G.Application of in Situ Transmission Electron Microscopy Inelectrochemistry[J]. Scientia Sinica Chimica, 2021, 51(11): 1489-1500.
[36] SASAKI Y, YOSHIDA K, KAWASAKI T, et al.In Situ Electron Microscopy Analysis of Electrochemical Zn Deposition Onto an Electrode[J]. Journal of Power Sources, 2021, 481: 228831.
[37] ZENG Z Y, BARAI P, LEE S Y, et al.Electrode Roughness Dependent Electrodeposition of Sodium at the Nanoscale[J]. Nano Energy, 2020, 72: 104721.
[38] PU S D, GONG C, GAO X W, et al.Current-Density-Dependent Electroplating in Ca Electrolytes: From Globules to Dendrites[J]. ACS Energy Letters, 2020, 5(7): 2283-2290.
[39] ZHOU S Y, SHI J, LIU S G, et al.Visualizing Interfacial Collective Reaction Behaviour of Li-S Batteries[J]. Nature, 2023, 621: 75-81.
[40] TAN S F, CHEE S W, BARAISSOV Z, et al.Intermediate Structures of Pt-Ni Nanoparticles during Selective Chemical and Electrochemical Etching[J]. The Journal of Physical Chemistry Letters, 2019, 10(20): 6090-6096.
[41] MCDOWELL M T, RYU I, LEE S W, et al.Studying the Kinetics of Crystalline Silicon Nanoparticle Lithiation with in Situ Transmission Electron Microscopy[J]. Advanced Materials, 2012, 24(45): 6034-6041.
[42] ZHU G Z, PRABHUDEV S, YANG J, et al.In Situ Liquid Cell TEM Study of Morphological Evolution and Degradation of Pt-Fe Nanocatalysts during Potential Cycling[J]. The Journal of Physical Chemistry C, 2014, 118(38): 22111-22119.
[43] GAO P, KANG Z C, FU W Y, et al.Electrically Driven Redox Process in Cerium Oxides[J]. Journal of the American Chemical Society, 2010, 132(12): 4197-4201.
[44] ZHANG H, XU T, YU K H, et al.Tailoring Atomic Diffusion for in Situ Fabrication of Different Heterostructures[J]. Nature Communications, 2021, 12(1): 4812.
[45] CUI J F, ZHANG Z Y, LIU D D, et al.Unprecedented Piezoresistance Coefficient in Strained Silicon Carbide[J]. Nano Letters, 2019, 19(9): 6569-6576.
[46] LI X, ZHU Q, HONG Y R, et al.Revealing the Pulse-Induced Electroplasticity by Decoupling Electron Wind Force[J]. Nature Communications, 2022, 13(1): 6503.
[47] ZHAO S T, ZHANG R P, CHONG Y, et al.Defect Reconfiguration in a Ti-Al Alloy via Electroplasticity[J]. Nature Materials, 2021, 20(4): 468-472.
[48] TOKU Y, KIZAWA K, KIMURA Y, et al.Atom Rearrangement by Cyclic Electron Shaking[J]. Advanced Engineering Materials, 2023, 25(12): 2300115
[49] ZENG L J, YANG H X, ZHANG Y, et al.Nonlinear Current-Voltage Behavior and Electrically Driven Phase Transition in Charge-Frustrated LuFe₂O₄[J]. EPL (Europhysics Letters), 2008, 84(5): 57011.
[50] PARK J H, SCHNEIDER N M, GROGAN J M, et al.Control of Electron Beam-Induced Au Nanocrystal Growth Kinetics through Solution Chemistry[J]. Nano Letters, 2015, 15(8): 5314-5320.
[51] GROGAN J M, SCHNEIDER N M, ROSS F M, et al.Bubble and Pattern Formation in Liquid Induced by an Electron Beam[J]. Nano Letters, 2014, 14(1): 359-364.
[52] XU S, LI P F, LU Y.In Situ Atomic-Scale Analysis of Rayleigh Instability in Ultrathin Gold Nanowires[J]. Nano Research, 2018, 11(2): 625-632.
[53] WANG R M, ZHANG H Z, FARLE M, et al.Structural Stability of Icosahedral FePt Nanoparticles[J]. Nanoscale, 2009, 1(2): 276-279.
[54] WANG R M, DMITRIEVA O, FARLE M, et al.Layer Resolved Structural Relaxation at the Surface of Magnetic FePt Icosahedral Nanoparticles[J]. Physical Review Letters, 2008, 100(1): 017205.
[55] KAO W C, JHONG F J, YIN Y T, et al.High-Quality AlN Epilayers Prepared by Atomic Layer Deposition and Large-Area Rapid Electron Beam Annealing[J]. Materials Chemistry and Physics, 2023, 304: 127895.
[56] SHEN Y T, XU T, TAN X D, et al.In Situ Repair of 2D Chalcogenides under Electron Beam Irradiation[J]. Advanced Materials, 2018, 30(14): 1705954.
[57] WOEHL T J, EVANS J E, ARSLAN I, et al.Direct in Situ Determination of the Mechanisms Controlling Nanoparticle Nucleation and Growth[J]. ACS Nano, 2012, 6(10): 8599-8610.
[58] GUO Y N, CUI H T, JIA P, et al.Nanoscale Cold Welding of Glass[J]. Matter, 2024, 7(12): 4390-4397.
[59] SONG F Q, WANG T Y, WANG X F, et al.Visualizing Plasmon Coupling in Closely Spaced Chains of Ag Nanoparticles by Electron Energy-Loss Spectroscopy[J]. Small, 2010, 6(3): 446-451.
[60] WANG X F, SONG F Q, CHEN Q, et al.Scaling Dopant States in a Semiconducting Nanostructure by Chemically Resolved Electron Energy-Loss Spectroscopy: A Case Study on Co-Doped ZnO[J]. Journal of the American Chemical Society, 2010, 132(18): 6492-6497.
[61] PRASAD M, ARYA D S, KHANNA V K.Fabrication and Reliability Study of a Double Spiral Platinum-Based MEMS Hotplate[J]. Nanolithography, MEMS, and MOEMS, 2015, 14(2): 025003.
[62] CHUNG G S, JEONG J M.Fabrication of Micro Heaters on Polycrystalline 3C-SiC Suspended Membranes for Gas Sensors and Their Characteristics[J]. Microelectronic Engineering, 2010, 87(11): 2348-2352.
[63] SAMAEIFAR F, HAJGHASSEM H, AFIFI A, et al.Implementation of High-Performance MEMS Platinum Micro-Hotplate[J]. Sensor Review, 2015, 35(1): 116-124.
[64] TRIANTAFYLLOPOULOU R, CHATZANDROULIS S, TSAMIS C, et al.Alternative Micro-Hotplate Design for Low Power Sensor Arrays[J]. Microelectronic Engineering, 2006, 83(4/5/6/7/8/9): 1189-1191.
[65] LI P F, HAN Y, ZHOU X, et al.Thermal Effect and Rayleigh Instability of Ultrathin 4H Hexagonal Gold Nanoribbons[J]. Matter, 2020, 2(3): 658-665.
[66] JIANG Y Y, DUCHAMP M, ANG S J, et al.Dynamics of the FCC-to-Bcc Phase Transition in Single-Crystalline PdCu Alloy Nanoparticles[J]. Nature Communications, 2023, 14: 104.
[67] LI Y B, HUANG W, LI Y Z, et al.Opportunities for Cryogenic Electron Microscopy in Materials Science and Nanoscience[J]. ACS Nano, 2020, 14(8): 9263-9276.
[68] FLATHMANN C, MEYER T, ROSS U, et al.Relationship between Structure and Charge/Orbital Order in Epitaxial Single Layer Ruddlesden-Popper Manganite Thin Films[J]. APL Materials, 2024, 12(6): 061112.
[69] HAN Y, WANG L Q, CAO K, et al.In situ TEM Characterization and Modulation for Phase Engineering of Nanomaterials[J]. Chemical Reviews, 2023, 123(24): 14119-14184.
[70] JIN C H, SUENAGA K, IIJIMA S.Plumbing Carbon Nanotubes[J]. Nature Nanotechnology, 2008, 3(1): 17-21.
[71] TOHMYOH H.A Governing Parameter for the Melting Phenomenon at Nanocontacts by Joule Heating and Its Application to Joining Together Two Thin Metallic Wires[J]. Journal of Applied Physics, 2009, 105: 014907.
[72] PENG Y, CULLIS T, INKSON B.Bottom-up Nanoconstruction by the Welding of Individual Metallic Nanoobjects Using Nanoscale Solder[J]. Nano Letters, 2009, 9(1): 91-96.
[73] TOHMYOH H, IMAIZUMI T, HAYASHI H, et al.Welding of Pt Nanowires by Joule Heating[J]. Scripta Materialia, 2007, 57(10): 953-956.
[74] ZHONG L, WANG J W, SHENG H W, et al.Formation of Monatomic Metallic Glasses through Ultrafast Liquid Quenching[J]. Nature, 2014, 512(7513): 177-180.
[75] ŻAK A M.Light-Induced in Situ Transmission Electron Microscopy -Development, Challenges, and Perspectives[J]. Nano Letters, 2022, 22(23): 9219-9226.
[76] OHNO Y.Development of an Apparatus for In-situ Near-Field Photoexcitation in a Transmission Electron Microscope[J]. Applied Physics Express, 2012, 5(12): 125204.
[77] REN X Y, MEI X S, ZHOU J Z, et al.Laser-Induced Self-Limiting Welding of Ag Nanowires with High Mechanical and Electrical Performance[J]. Advanced Materials, 2024, 36(48): 2408575.
[78] XIANG B, HWANG D J, IN J B, et al.In Situ TEM Near-Field Optical Probing of Nanoscale Silicon Crystallization[J]. Nano Letters, 2012, 12(5): 2524-2529.
[79] VADAI M, ANGELL D K, HAYEE F, et al.In-Situ Observation of Plasmon-Controlled Photocatalytic Dehydrogenation of Individual Palladium Nanoparticles[J]. Nature Communications, 2018, 9: 4658.
[80] FUNK H, SHARGAIEVA O, ELJARRAT A, et al.In Situ TEM Monitoring of Phase-Segregation in Inorganic Mixed Halide Perovskite[J]. The Journal of Physical Chemistry Letters, 2020, 11(13): 4945-4950.
[81] DANZ T, DOMRÖSE T, ROPERS C. Ultrafast Nanoimaging of the Order Parameter in a Structural Phase Transition[J]. Science, 2021, 371(6527): 371-374.
[82] ZHU S M, FU J C, LI H L, et al.Direct Observation of Magnetocrystalline Anisotropy Tuning Magnetization Configurations in Uniaxial Magnetic Nanomaterials[J]. ACS Nano, 2018, 12(4): 3442-3448.
[83] KARIM A, GUAN C S, CHEN B, et al.Dynamic Observation of Joule Heating-Induced Structural and Domain Transformation in Smart Shape-Memory Alloy[J]. Acta Materialia, 2020, 186: 223-228.
[84] LV X W, LV H L, HUANG Y L, et al.Distinct Skyrmion Phases at Room Temperature in Two-Dimensional Ferromagnet Fe₃GaTe₂[J]. Nature Communications, 2024, 15(1): 3278.
[85] YAMAMOTO K, HOGG C R, YAMAMURO S, et al.Dipolar Ferromagnetic Phase Transition in Fe₃O₄ Nanoparticle Arrays Observed by Lorentz Microscopy and Electron Holography[J]. Applied Physics Letters, 2011, 98(7): 072509.
[86] WU J B, SHAN H, CHEN W L, et al.In Situ Environmental TEM in Imaging Gas and Liquid Phase Chemical Reactions for Materials Research[J]. Advanced Materials, 2016, 28(44): 9686-9712.
[87] ZHAO T Q, JIANG Y H, LUO S W, et al.On-Chip Gas Reaction Nanolab for in situ TEM Observation[J]. Lab on a Chip, 2023, 23(17): 3768-3777.
[88] YUAN W T, ZHU B E, FANG K, et al.In Situ Manipulation of the Active Au-TiO₂ Interface with Atomic Precision during CO Oxidation[J]. Science, 2021, 371(6528): 517-521.
[89] FREY H, BECK A, HUANG X, et al.Dynamic Interplay between Metal Nanoparticles and Oxide Support under Redox Conditions[J]. Science, 2022, 376(6596): 982-987.
[90] LYU Y Q, WANG P, LIU D D, et al.Tracing the Active Phase and Dynamics for Carbon Nanofiber Growth on Nickel Catalyst Using Environmental Transmission Electron Microscopy (Small Methods 6/2022)[J]. Small Methods, 2022, 6(6): 2270036.
[91] LIAO H G, ZHENG H M.Liquid Cell Transmission Electron Microscopy[J]. Annual Review of Physical Chemistry, 2016, 67: 719-747.
[92] LIAO H G, CUI L K, WHITELAM S, et al.Real-Time Imaging of Pt₃Fe Nanorod Growth in Solution[J]. Science, 2012, 336(6084): 1011-1014.
[93] YUK J M, PARK J, ERCIUS P, et al.High-Resolution EM of Colloidal Nanocrystal Growth Using Graphene Liquid Cells[J]. Science, 2012, 336(6077): 61-64.
[94] LIAO H G, ZHEREBETSKYY D, XIN H L, et al.Facet Development during Platinum Nanocube Growth[J]. Science, 2014, 345(6199): 916-919.
[95] SHEN Y T, SU S, XU T, et al.In Situ Transmission Electron Microscopy Investigation on Oriented Attachment of Nanodiamonds[J]. Nano Letters, 2023, 23(20): 9602-9608.
[96] ZHU C, LIANG S X, SONG E H, et al.In-Situ Liquid Cell Transmission Electron Microscopy Investigation on Oriented Attachment of Gold Nanoparticles[J]. Nature Communications, 2018, 9(1): 421.
[97] WANG W, XU T, CHEN J G, et al.Solid-Liquid-Gas Reaction Accelerated by Gas Molecule Tunnelling-Like Effect[J]. Nature Materials, 2022, 21(8): 859-863.