激光刻蚀制备图案化润湿性表面及其脱湿性能研究

周诗远; 龙子琦; 杨皓翔; 黄帅

doi:10.16490/j.cnki.issn.1001-3660.2025.21.004

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表面技术 ›› 2025, Vol. 54 ›› Issue (21) : 64-73. DOI: 10.16490/j.cnki.issn.1001-3660.2025.21.004

专题——超浸润多级表面结构的设计与应用

激光刻蚀制备图案化润湿性表面及其脱湿性能研究

周诗远, 龙子琦, 杨皓翔, 黄帅^*

作者信息 +

Patterned Wettability Surfaces Prepared by Laser Etching and Their Dewetting Properties

ZHOU Shiyuan, LONG Ziqi, YANG Haoxiang, HUANG Shuai^*

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文章历史 +

摘要

目的提出一种激光刻蚀制备图案化超疏水表面,实现可控不连续脱湿的方法。方法利用激光刻蚀配合氟硅烷修饰,制备超疏水表面。探讨激光功率P、扫描速度v、扫描间距x、频率f和加工次数t等参数对表面微结构和疏水性能的影响。再次刻蚀,实现表面的图案化,利用带缺口的圆环超亲水图案,实现可控的不连续脱湿。结果通过激光刻蚀方法成功制备出超疏水表面,在P=9 W、v=1 000 mm/s、x=10 μm、t=2、f=30 Hz时,铝片表面的润湿性能最佳,接触角为161°±1°,滚动角为1.7°±0.5°。通过再次刻蚀可以实现表面图案化,所制备的铝基超疏水表面可以承受10次耐磨循环、20次粘揭循环、10次冷热循环,在HCl和NaOH溶液中分别可以保持6 h和3 h的超疏水性,并且具有良好的自清洁性能。从带缺口圆环图案的不连续脱湿过程中发现,通过调控图案化表面的倾斜角度θ、圆环直径Φ、圆环缺口角度α、脱湿方向,不仅可以控制带缺口的圆环图案所捕获液滴的体积,还可以控制所捕获液滴的状态。结论采用激光刻蚀法能够简单、高效地获得图案化超疏水表面,具有较好的力学性能和化学稳定性,能够通过可控的不连续脱湿捕获液滴阵列,具有广阔的应用前景。

Abstract

The work aims to propose a new method to achieve controlled discontinuous dewetting by preparing patterned superhydrophobic surfaces through laser etching. Superhydrophobic surfaces were prepared by combining laser etching with Fluorinated Alkyl Silane (FAS) modification, and then superhydrophilic patterns were constructed via secondary laser etching to realize surface patterning. The effects of key laser parameters, such as power, scanning speed, scanning spacing, frequency, and processing times, on surface wettability were investigated systematically, and the surface microstructure and chemical composition were characterized through Scanning Electron Microscope (SEM) and Energy Dispersive X-ray Spectroscopy (EDS). In addition, the mechanical stability, chemical stability, thermal stability, and self-cleaning performance of the prepared aluminum-based superhydrophobic surface were evaluated, and the discontinuous dewetting behavior of the notched ring superhydrophilic pattern was studied in detail. The aluminum sheet surface achieved the optimal superhydrophobic performance under the following parameters: laser power P=9 W, scanning speed v=1 000 mm/s, scanning spacing x=10 μm, processing times t=2, and frequency f=30 Hz, at a contact angle of 161°±1° and a sliding angle of 1.7°±0.5°. SEM observations revealed that these parameters induced the formation of a micro-nano hierarchical structure similar to that of a lotus leaf surface, which trapped air, thereby enhancing hydrophobicity. EDS analysis confirmed the successful modification of FAS and the effective removal of the FAS layer after secondary etching, verifying the controllable regulation of wettability. The Al-based superhydrophobic surface exhibited excellent stability and could withstand 10 wear cycles, 20 adhesion-peeling cycles, and 10 thermal cycles without losing superhydrophobicity. In terms of chemical stability, it could maintain superhydrophobicity for 6 hours in 1 mol/L HCl solution, 3 hours in 1 mol/L NaOH solution, and more than 12 hours in 3.5% NaCl solution. Self- cleaning tests showed that rolling water droplets effectively removed fine sand, hydrophilic SiO₂ particles, and hydrophobic SiO₂ particles on a 30° inclined surface. This method was universal for various metals. The surfaces of Fe, Zn, brass, Pb, Ti, 304 stainless steel, Cu and Mg were originally hydrophilic, but after treatment, their contact angles exceeded 150° and sliding angles were less than 10°, achieving superhydrophobicity. Moreover, patterning was realized through secondary etching. The focus of this study was the discontinuous dewetting behavior of the notched ring superhydrophilic pattern. The effects of the tilt angle θ of the patterned surface, the ring diameter Φ, the notch angle α, and the dewetting direction on droplet capture were explored. The results showed that the droplet volume decreased with the increase of the tilt angle θ. Under different parameters, the droplet states were divided into three types: liquid film, droplet-like, and continuous dewetting. In conclusion, the laser etching method can simply and efficiently prepare patterned superhydrophobic surfaces with excellent mechanical, chemical, and thermal stability, as well as good self-cleaning performance. The controllable discontinuous dewetting characteristic of the notched ring pattern makes it have broad application prospects in the fields of microfluidics, high-throughput screening, and quantitative analysis.

导出引用

周诗远, 龙子琦, 杨皓翔, 黄帅. 激光刻蚀制备图案化润湿性表面及其脱湿性能研究[J]. 表面技术. 2025, 54(21): 64-73 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.21.004

ZHOU Shiyuan, LONG Ziqi, YANG Haoxiang, HUANG Shuai. Patterned Wettability Surfaces Prepared by Laser Etching and Their Dewetting Properties[J]. Surface Technology. 2025, 54(21): 64-73 https://doi.org/10.16490/j.cnki.issn.1001-3660.2025.21.004

中图分类号： TG174.4

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