目的 针对聚(3,4-亚乙基二氧噻吩)/聚(苯乙烯磺酸盐)(PEDOT:PSS)薄膜的电导率低的问题，采用二次掺杂方法，提高薄膜电导率和品质因数(FoM)，为制备可打印导电薄膜以及柔性光电器件表面导电层提供技术支撑。方法 采用多种无机酸分别与PEDOT:PSS溶液共混的掺杂方法，通过旋涂法在基底上制备透明导电薄膜。利用四点探针法、分光光度计测试系统，对掺杂处理后薄膜的方块电阻、透光率、导电率和品质因数进行测试及分析。利用原子力显微镜(AFM)、X射线光电子能谱(XPS)和霍尔效应测试系统，对薄膜内部结构进行有理分析，总结提升薄膜电导率的原因。结果 无机酸对薄膜电导率具有提升作用，通过硫酸的掺杂作用后，电导率可以由0.9 S/cm提高到2 216 S/cm，FoM从0.03提高到33;通过焦磷酸掺杂处理后的薄膜，电导率可以提高到1 623 S/cm，FoM提高到40。结论 掺杂试剂的沸点、解离常数、退火温度以及共混液的黏度都会影响薄膜的光电性能。解离常数越低，更容易解离出氢离子的掺杂试剂，能够与PSS结合形成PSSH，促进PEDOT和PSS分离。沸点低和解离常数小的无机酸掺杂试剂，能够有效提高薄膜的电导率，并能够获得高品质因数的薄膜。PEDOT:PSS通过无机酸改性处理后，减小了PEDOT和PSS之间作用力的同时，提高了薄膜内部PEDOT的相对含量，使PEDOT链变得线性，促进载流子传输，从而使薄膜的电导率提高。

Poly (3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT:PSS) is a new conductive film material. In order to improve the physical properties of the film, an effective secondary doping method is adopted. The conductivity of PEDOT:PSS film was improved by secondary doping with various inorganic acids. The physical properties of doped film were tested and analyzed by four point probe method and UV spectrophotometer. Atomic force microscope (AFM) was used to measure the surface morphology of the film. The internal structure of the film was analyzed by X-ray photoelectron spectroscopy (XPS) and Hall effect testing system.