目的 磨削后工件表面残余应力处于裂纹层下方其位置隐蔽、不易检测，使用过程中受到应力作用易扩展成裂纹，影响后续工艺参数设计和工件使用寿命。因此，研究磨削后表面残余应力层深度有助于确定后续工艺加工余量，提高工件使用性能。方法 本文采用离散元法建立单颗磨粒磨削熔石英的离散元模型，研究磨粒粒径对工件亚表面损伤深度的影响。采用角度抛光法和差动腐蚀法测量熔石英亚表面裂纹层和损伤层深度，计算残余应力层深度并验证模型。结果 当磨粒粒径分别为7、14、28、40 μm时，仿真得到的裂纹层深度分别为2.53、3.02、4.07、7.39 μm，残余应力层深度分别为0.75、1.00、1.34、2.33 μm;实验测得的裂纹层深度分别为2.51、3.14、4.65、8.16 μm，残余应力层深度分别为0.86、0.93、1.31、1.87 μm。由此可见，随着磨粒粒径的增大，工件表面的脆性去除愈加明显，表面质量变差，亚表面裂纹层深度和残余应力层深度增大。仿真预测裂纹层深度与实验值偏差小于15%，残余应力层深度偏差小于25%，残余应力层深度约为裂纹层深度的1/4~1/3，随磨粒粒径增大，比例逐渐减小。结论 离散元仿真可有效预测熔石英磨削后的残余应力层深度，为其磨削工艺的制定提供参考。

Fused quartz has excellent physical and chemical properties, and is widely used in manufacture of optical components and other industries and many fields of modern science and technology. However, fused quartz glass is a high hard and brittle material. Cracks, residual stress and other damage are likely to occur during processing. The surface residual stress layer of the workpiece after grinding is under the crack layer, its position is hidden and difficult to observe. During the use of the workpiece, it is easy to expand into cracks under the action of external load, which affects the design of subsequent process parameters and the service life of the workpiece. Therefore, researching on the depth of surface residual stress layer after grinding is helpful to determine the residual processing allowance and improve the working performance of the workpiece.