目的 为有效预测等离子喷涂热障涂层冷却过程中累积的残余应力，降低残余应力对涂层稳定性的影响，需寻求可靠的热障涂层应力检测方法。方法 利用有限元分析软件，采用生死单元法建立了等离子喷涂ZrO2涂层的有限元模型，高斯热源模拟等离子喷涂热源工况，研究涂层冷却至室温的残余应力及其分布。使用X射线衍射法、拉曼光谱法对等离子喷涂制备的ZrO2涂层进行残余应力检测。结果 通过有限元模拟结果可以看出，喷涂涂层冷却到室温后其中心区域的残余应力与边缘位置相比较大，主要集中在热流中心区域;每层涂层结合界面处会产生较大应力，致使应力沿涂层厚度方向变化明显。涂层的等效应力为160~ 220 MPa。采用X射线衍射法检测涂层存在180~185 MPa残余应力。标定ZrO2涂层的拉曼-应力因子为8.33 (cm.GPa)^?1，计算得到涂层存在残余应力为174~180 MPa。对喷涂试样进行拉伸试验后，其残余应力有一定程度的释放。结论 使用有限元能有效模拟等离子喷涂至室温时涂层内部残余应力，与XRD、拉曼光谱检测结果具有良好的匹配性，涂层冷却至室温存在180 MPa左右的残余应力，严重影响涂层的稳定性。

Plasma sprayed ZrO2 ceramic coating has been widely used in many industrial fields due to its simple manufacturing process, low cost, and good heat insulation effect. However, the structure and service conditions of thermal barrier coatings are complex, and residual stresses will inevitably occur during the preparation process as well as application. Residual stress has the most obvious influence on the life of thermal barrier coatings, seriously reducing the bonding strength between the coating and the substrate, and ultimately showing the cracking and spalling of the coating, greatly reducing the service time and stability of the coating during service. To realize the prediction and detection of the residual stress, it is necessary to seek a reliable detection method for thermal barrier coating to effectively predict the accumulated residual stress in the cooling process of coating and reduce the influence of residual stress on the stability of the coating. In this paper, the finite element model of plasma-sprayed ZrO2 coating was established by using the birth and death element method. Gauss heat source was used to simulate the heat source condition of plasma spraying, and the residual stress and its distribution of the coating cooling to room temperature were studied. The residual stress of ZrO2 coating prepared by plasma spraying was detected by X-ray diffraction and Raman spectroscopy to explore the accurate detection method of residual stress in ceramic coating.