目的 研究苯甲酸钠、酒石酸钠、柠檬酸钠、甘氨酸等缓蚀剂在镁合金化学机械抛光(CMP)中的缓蚀作用。方法 用苹果酸、氧化铝磨粒、去离子水及不同缓蚀剂配制不同种类的抛光液。在抛光垫的种类、抛光盘转速、抛光液流速、pH调节剂的种类等都相同的条件下，进行化学机械抛光试验。用3D白光干涉轮廓仪对抛光后的镁合金片进行表征，通过电化学腐蚀试验、X射线光电子能谱(XPS)分析缓蚀机理。 结果 通过对比试验发现，酒石酸钠和苯甲酸钠在酸性条件下的缓蚀效果最佳。酒石酸钠和苯甲酸钠均通过促进抛光液中溶解氧对镁合金表面的氧化作用形成钝化膜，从而抑制镁合金的进一步腐蚀。镁合金在含有苯甲酸钠的溶液中生成的钝化膜的腐蚀抑制性高于含有酒石酸钠的溶液中形成的钝化膜。苯甲酸钠和酒石酸钠均参与钝化膜的生成，但经XPS分析，镁合金经含有苯甲酸钠溶液浸泡后形成的表面膜中的镁含量少于经含有酒石酸钠溶浸泡后钝化膜中的镁含量。经电化学腐蚀试验发现，镁合金在含苯甲酸钠的溶液中的腐蚀电位正向移动量大于镁合金在含酒石酸钠的溶液中腐蚀电位的正向移动量，证明在相同浓度的前提下，苯甲酸钠的缓蚀效果优于酒石酸钠。结论 在酸性条件下，苯甲酸钠的缓蚀效果强于酒石酸钠。在抛光压力为22 kPa、抛光转速为60 r/min、磨料为20 nm α-Al2O3的CMP工艺中，加入质量分数为1%的苯甲酸钠后，抛光后的表面质量最好，Ra=(3.594±0.194) nm。苯甲酸钠和酒石酸钠均为阳极缓蚀剂，能在镁合金表面形成钝化膜，腐蚀电位的升高意味着镁离子需要克服更大的势垒才能从镁合金表面转入溶液中。

The purpose of this study was to study the corrosion inhibition effect of sodium benzoate, sodium tartrate, sodium citrate and glycine in chemical mechanical polishing (CMP) of magnesium alloys. Using malic acid, alumina abrasive, deionized water and different corrosion inhibitors to configure different polishing fluid. The chemical mechanical polishing experiments were carried out under the same conditions, such as the type of polishing pad, the rotation speed of polishing disc, the flow rate of polishing fluid and the type of pH regulator. The polishing magnesium alloy sheet was characterized by 3D white light interferometry, and the corrosion inhibition mechanism was analyzed by electrochemical corrosion test and X-ray photoelectron spectroscopy (XPS). The results show that sodium tartrate and sodium benzoate have the best inhibition effect under acidic conditions. Both sodium tartrate and sodium benzoate inhibit the further corrosion of magnesium alloy by promoting the oxidation of dissolved oxygen in the polishing solution to the surface of magnesium alloy and forming passivation film. The corrosion inhibition of magnesium alloy passivation film formed in solution containing sodium benzoate is higher than that in solution containing sodium tartrate. Both sodium benzoate and sodium tartrate are involved in the formation of passivation film, but XPS analysis shows that the magnesium content in the surface film of magnesium alloy soaked with sodium benzoate solution is less than that of passivation film soaked with sodium tartrate solution. The electrochemical corrosion experiments show that the positive movement of corrosion potential of magnesium alloy in the solution containing sodium benzoate is greater than that of magnesium alloy in the solution containing sodium tartrate, which proves that the inhibition effect of sodium benzoate is better than that of sodium tartrate at the same concentration. Under acidic conditions, the inhibition effect of sodium benzoate was stronger than that of sodium tartrate. In the CMP process of polishing pressure 22 kPa, polishing speed 60 r/min, abrasive 20 nm α-Al2O3, adding 1wt.% sodium benzoate, the polishing surface quality is the best, Ra=(3.594±0.194) nm. Both sodium benzoate and sodium tartrate are anodic corrosion inhibitors, which can form passivation film on the surface of magnesium alloy. The increase of corrosion potential means that magnesium ions need to overcome a larger barrier to transfer from magnesium alloy surface to solution.