目的 探索制备摩擦因数低、硬度高、弹性模量高和耐磨性高的TiAlCN涂层。方法 采用多弧离子镀技术在F690钢表面沉积具有不同碳含量的TiAlCN涂层。通过扫描电镜(SEM)、激光共聚焦显微镜、拉曼光谱仪、透射电子显微镜、X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、纳米压痕仪、往复式摩擦磨损仪和台阶仪对涂层的结构、硬度、弹性模量、摩擦磨损性能和磨痕形貌进行分析。结果 碳含量对TiAlCN涂层的结构、硬度和摩擦学性能有比较明显的影响。涂层表面粗糙度会随着涂层中碳含量的增加而逐渐增大。此外，涂层的组成主要为fcc-TiN、fcc-TiC和hcp-AlN。随着涂层中碳含量的增加，涂层的晶粒取向由(111)变化为(200)，同时涂层中的非晶含量也逐渐增加，涂层的纳米硬度和弹性模量也随之下降。碳的质量分数为15.57%的TiAlC80N320涂层具有36.21 GPa的硬度和430.15 GPa的弹性模量。在干摩擦条件下，TiAlC80N320涂层具有较低的磨损率，为2.85×10^–6 mm³/(N.m)。TiAlC160N320涂层具有较低的摩擦因数，但是具有较高的磨损率(4.31×10^–6 mm³/(N.m))。结论 涂层中碳含量的增加会导致涂层中非晶含量的增加，涂层的硬度、弹性模量和耐磨性会随之降低，涂层的摩擦因数会降低。

The work aims to develop a TiAlCN coating with low friction coefficient, high hardness, high elastic modulus and high wear resistance. TiAlCN coatings with different carbon contents were deposited on the F690 steel by multi-arc ion plating system. The structure, hardness, elastic modulus, friction and wear resistance and wear track morphology of the coating were analyzed by scanning electron microscope (SEM), laser scanning confocal microscope, Raman spectrometer, transmission electron microscopy (TEM), X-ray diffractometer (XRD), X-ray photoelectron spectrometer (XPS), Nano indentation instrument, reciprocating friction and wear instrument and step profiler. The carbon content had a great effect on the structure, hardness and tribocorrosion property of TiAlCN coating. The roughness of the coating increased gradually with the increase of the carbon content in the coating. In addition, the coating was composed of fcc-TiN, fcc-TiC and hcp-AlN. With the increase of carbon content in the coating, the crystal orientation of the coating changed from (111) to (200), the amorphous carbon increased and the nano-hardness and the elastic modulus of the coating decreased. TiAlC80N320 with carbon content of 15.57wt.% had the hardness and elastic modulus of 36.21 GPa and 430.15 GPa, respectively. TiAlC80N320 coating had the lowest wear rate under dry friction, which was 2.85×10–6 mm3/(N.m). While TiAlC160N320 coating had the lowest friction coefficient, but the highest wear rate of 2.85×10–6 mm3/(N.m). The carbon content will result in the increase of amorphous content, but the hardness, elastic modulus and wear resistance of the coating decrease accordingly, and the friction coefficient of the coating is significantly reduced.