目的 提高微细磨料水射流对硬脆材料的加工能力，改善加工表面的形貌和质量。方法 引入超声振动作为辅助手段，使工件在垂直于加工表面方向作小振幅超声频振动。以K9玻璃为加工对象，利用自主设计搭建的超声辅助微细磨料水射流加工装置进行微孔冲蚀加工实验，并以无超声振动时的微孔加工实验作为对照。借助超景深三维显微镜对各实验条件下所加工的微孔进行观测，获取其尺寸和截面轮廓数据，研究超声振动对微孔尺寸、形貌的影响。结果 微孔的深度和顶部直径与射流压力的大小和加工时间的长短呈正相关。超声振动的引入，显著增加了微孔的深度，实验中深度的最大增幅达54.6%，但微孔顶部直径略有减小，最大降幅为8.2%，总体的材料去除量有所提升。塑性冲蚀作用主导了材料的去除过程，微孔的截面呈典型的“W”形。在引入超声振动后，“W”形截面形貌得到了改善，微孔中心凸起部分的材料得到更多的去除，底面平坦程度得到提升。结论 超声振动的引入增强了微细磨料水射流对K9玻璃的冲蚀性能，超声辅助微细磨料水射流加工技术可以实现对K9玻璃等硬脆材料的高质量、高效率加工。

The work aims to improve the processing ability of the micro-abrasive water jet on hard and brittle materials, and improve the morphology and quality of the machined surface. Ultrasonic vibration was introduced to vibrate the workpiece vibrate at a small amplitude and given ultrasonic frequency perpendicularly to the target surface. The in-house developed ultrasonic-assisted micro-abrasive water jet processing device was used to carry out the micro-hole erosion processing experiment on the K9 glass, and the related experiments without ultrasonic vibration were also used to be as the comparisons. The 3D microscope was used to observe the micro-holes machined under various experimental conditions, in which the cross- sectional profiles of micro-holes were measured, and then the effect of ultrasonic vibration on the profiles and morphology of micro-holes were studied. It is found that the depth and top diameter of the micro-holes were positively correlated with the jet pressure and processing time. The introduction of ultrasonic vibration significantly increased the depth of the micro-holes, with the maximum increase in depth to about 54.6%, but the top diameter of micro-holes was slightly reduced, with the maximum decrease of 8.2%, and the overall material removal rate was increased. It is because that the ductile erosion dominated the material removal process, as a result, the cross section of the micro-holes was a typical “W” shape. However, with the ultrasonic vibration the “W”-shaped cross-sectional profile had been improved, where the material of the protruding part of the center of the micro- hole had been more removed, and the flatness of the bottom surface has been improved as well. Thus, the ultrasonic vibration, indeed, enhances the erosion performance of micro-abrasive water jet on K9 glass, the ultrasonic-assisted micro- abrasive water jet processing technology can realize high-quality and high-efficiency processing of hard and brittle materials such as K9 glass.