目的 通过优化工艺参数，充分挖掘固结磨料研磨加工的优势。方法 采用固结磨料研抛垫对石英玻璃进行研磨，以材料去除率(MRR)和表面粗糙度(Ra)为评价指标，采用3因素3水平的响应曲面法，探索工件转速、研磨压力、研磨液流速三个工艺参数对固结磨料垫加工特性的影响规律。建立三个工艺参数作用下的MRR模型和Ra模型，结合响应曲面及其等高线，获得工艺参数变量两两复合的影响规律和各目标下的最优工艺参数。最后，对最优工艺参数进行实验验证。结果 实验结果及其分析表明，以最大材料去除率为目标的最佳工艺参数为:转速90 r/min，压力20.685 kPa，研磨液流速60 mL/min。以最小表面粗糙度为目标的最佳工艺参数为:转速100 r/min，压力20.685 kPa，研磨液流速80 mL/min。最优工艺的加工性能预测值为34.5 nm/min和38.5 nm，验证实验结果为37.6 nm/min和39.4 nm，二者的误差值在合理范围内。结论 研抛工艺参数的响应面模型具有良好的预测能力，预测误差很小，最优工艺参数下，工件表面平整光滑，没有明显的凹坑和粗大划痕。

The work aims to fully take advantages of fixed abrasive (FA) lapping /polishing. Fixed abrasive pads were employed to lap quartz glass, and material removal rate (MRR) and surface roughness (Ra) were chosen as the evaluation indicators. The influence of processing parameters on the machining performance of fixed abrasive lapping was investigated by using 3-factor and 3-level response surface method. The MRR model and the Ra model were developed. Combining the response surface method and its contour plot, the combined law of processing parameter and the optimal processing parameters under each target were obtained. Finally, the optimal processing parameters were verified. The results show that the best processing parameters for MRR are:rotation speed 90 r/min, load 20.685 kPa, slurry 60 mL/min, while those for surface roughness are:rotation speed 100 r/min, load 20.685 kPa, and slurry 80 mL/min. The predicted values of the models are 34.5 nm/min and 38.5 nm, in well accordance with those of verification experiment which are:37.6 nm/min and 39.4 nm. The comparison shows that the obtained model of processing parameter by response surface method has a very good predictive ability, the surface of machined work-piece at the optimized parameters is very smooth, and no obvious pits or coarse scratches are found.