目的 提高锆合金包壳管的事故容错能力。方法 采用磁控溅射法，在锆基底上沉积CrAlSi和CrAlSiN两种涂层，表征了涂层的结构形貌、机械性能和抗高温水蒸气氧化行为等。结果 CrAlSi涂层呈致密的柱状晶结构。CrAlSiN涂层结构致密，晶粒尺寸小，接近非晶质地。CrAlSiN涂层与Zr基底之间的结合力(~46 N)高于CrAlSi涂层与Zr基底之间的结合力(~27 N)，2种涂层的硬度大约为Zr基底硬度的3~4倍，表现出良好的机械性能。同时，这2种涂层均较大幅度提高Zr基底的抗高温水蒸气氧化能力。经1000 ℃水蒸气氧化15 min后，4.3 μm厚的CrAlSi涂层使Zr(O)层的厚度减少了~67%，而4.6 μm厚的CrAlSiN涂层则抑制了Zr(O)层的形成。14 μm厚的CrAlSiN涂层使Zr基底在1200 ℃高温水蒸气中保持未氧化状态大于60 min。结论 磁控溅射制备的CrAlSi涂层和CrAlSiN涂层均能有效地抑制Zr合金的高温水蒸气氧化，且后者的防护效果更佳。

To enhance the accident tolerance of zirconium (Zr) alloy claddings, CrAlSi and CrAlSiN coatings were deposited on Zr substrates by magnetron sputtering. The microstructure, mechanical properties, and high temperature steam oxidation resistance of the coatings were characterized. The results showed that the CrAlSi coating exhibited dense columnar crystalline structure, while the CrAlSiN coating exhibited dense structure, with very small grain nearly closer to amorphous. The adhesion between CrAlSiN coating and Zr substrate (~46 N) is higher than that between CrAlSi coating and Zr substrate (~27 N). Both coatings had good mechanical properties and improved high resistance against the high-temperature steam oxidation for the Zr substrate. Their hardness values were about 3 to 4 times that of the Zr substrate. Meanwhile, after the 1 000 ℃ steam oxidation test for 15 minutes, the thickness of Zr(O) layer decreased by 67% for it was coated with a 4.3 μm thick CrAlSi coating, and no oxidation of the Zr substrate occurred after it was coated by a 4.6 μm thick CrAlSiN coating. Furthermore, a 14 μm thick CrAlSiN coating could prevent the Zr substrate from oxidation in the 1 200 ℃ steam more than 60 min. Both CrAlSi and CrAlSiN coatings prepared by magnetron sputtering can effectively inhibit the high temperature steam oxidation of Zr alloy, and the latter has a better protective effect.