目的 探究氧气流量对电弧离子镀制备的TiAlON涂层结构和性能的影响。方法 在高速钢表面，使用自制的电弧离子镀设备，在不同的氧气流量下制备了不同O含量的TiAlON涂层。采用EDS结合XPS对涂层的成分进行分析，采用XRD对涂层的晶体结构进行分析，采用SEM对涂层的表面形貌进行分析，采用努氏硬度表征了涂层的硬度，使用压痕法和划痕法对TiAlON涂层的结合强度进行分析，将样品在900 ℃条件下保温1 h，对热处理后涂层的表面形貌和成分进行了分析。结果 氧气流量从30 mL/min增加到120 mL/min时，涂层中的O原子数分数从57.48%增加到62.32%。涂层中N含量极少，在1.51%以内。XRD结果表明，TiAlON涂层的主要组成物相为氧化钛，并以(200)晶面的取向占主导。随着氧气流量的增加，涂层表面的液滴和孔洞的数量和大小先增加后减少，涂层的硬度和结合强度受氧气流量的影响不大。涂层经过高温热处理后，当氧元素原子数分数低于60.55%时，涂层表面出现剥落、鼓包、基体元素扩散等现象，当氧元素原子数分数增加到61.20%时，在涂层表面未发现该现象。结论 氧气流量与TiAlON涂层的抗高温氧化性正相关，氧气流量的增加改变了电弧放电状态，从而对表面质量有较大影响，涂层的硬度和结合强度受氧气流量的影响不大。

The work aims to explore the influence of oxygen flows on structure and properties of arc ion Plating TiAlON coatings. TiAlON coatings of different oxygen content were deposited on high-speed steel at varying oxygen flows by the self-produced arc ion plating system. The components of the coatings were analyzed with EDS in combination with XPS. The crystal structure of the coatings was analyzed with XRD. The surface morphologies of the coatings were analyzed with SEM. The hardness of the coatings was characterized with Knoop hardness; and adhesion strength of the coatings was analyzed with indentation method and scratch method. The surface morphologies and components of the coatings after heat treatment after being kept at 900 ℃ for one hour were analyzed. The results showed that the O content incorporated into the coatings varied from 57.48at.% to 62.32at.% with the oxygen flow increasing from 30 mL/min to 120 mL/min. The N element incorporated into the coating was little (less 1.51at.%) and is dominated by (200) crystal face orientation. As the oxygen flow increased, the size and number of droplets and holes on the coating surface increased first and then decreased. The hardness and adhesion strength of coating changed in a small range. Spalling areas, bulges and outward-diffused substrate elements were found on the coating surface with oxygen content less than 60.55at.% after the high temperature oxidation test. When the oxygen content increased to 61.20at.%, spalling areas and bulges were not found on the coating surface. Oxygen flow is positively related to the high temperature oxidation resistance of TiAlON coatings. The increase of oxygen flow changes the arc discharge state, which has great influence on the surface quality. The hardness and adhesion strength of the coating are not affected by oxygen flow.